SBIR PHASE II: A High-Energy Electron Injector for X-ray Chip Lithography and Microfabrication

9529825 Yu这个小型企业创新研究第二阶段项目探索了一种紧凑、高梯度的电子直线加速器，作为多端口、高通量、同步加速器X射线辐射存储环的注入器。该设备将用于制造微电子芯片和微电子机械系统(MEMS)的X射线光刻机。第一阶段生产了一种紧凑的全能量注入器设计，与超导存储环X射线源很好地匹配。脉冲隔膜和Kicker磁铁也被设计用于全能量注射。第二阶段将提出X射线源系统的详细设计，并使用新的注入方案对紧凑型环中存储和维护的高电流进行模拟测试。在同时进行的第三阶段开发中，在私营部门的资助下，将建造一种新的全能源、高梯度喷油器的商业原型。通过分包给新泽西州卡特雷特的牛津仪器公司，第二阶段还将改装一个Helios 2超导环，以进行全能量注入。新一代高通量X射线光刻机的潜在商业应用有望在特征尺寸小于0.18微米的光刻中实现。预计这将使微电子行业在质量和生产率方面实现重大扩张。新的注入技术也可以应用于MEMS微制造，预计MEMS微制造也将大幅增长。

9529825 Yu This Small Business Innovation Research (SBIR) Phase II project explores a compact, high-gradient electron linear accelerator as an injector to a multiport, high-throughput, synchrotron X-ray radiation storage ring. The device will be used in X-ray lithography machines for manufacture of microelectronic chips and microelectromechanical systems (MEMS). Phase I produced a compact design for a full-energy injector that matches well to a superconducting storage ring X-ray source. A pulsed septum and kicker magnet were also designed for use with full-energy injection. Phase II will produce a detailed design of the X-ray source system and run simulation tests of high current stored and maintained in the compact ring using the new injection scheme. In concurrent Phase III development, under private-sector funding, a commercial prototype of a new full-energy, high-gradient injector will be built. By subcontract to Oxford Instruments of Carteret, NJ, Phase II will also modify a Helios 2 superconducting ring for full-energy injection. Potential commercial applications are expected in a new generation of high-throughput X-ray machines for lithography at feature sizes finer than 0.18 micron. This is expected to enable a major expansion in quality and productivity of the microelectronics industry. The new injection technology can also be adapted to MEMS microfabrication, which is also expected to grow significantly.