National Science Foundation Research Equipment Grant Program: TiNi Sputtering System

9622283卡门这项研究设备赠款将扩大加州大学洛杉矶分校机械、航空航天和核工程系正在进行的研究和教育的范围。购买一种独特的溅射系统，能够在不同的衬底上沉积薄膜TiNi是新颖的，应该会产生有趣和重要的结果。开发一种专用的超高真空这种在具有光刻能力的洁净室设施中的溅射系统将为加州大学洛杉矶分校的薄膜研究提供全国独一无二的设施。如果可以控制溅射设备，使化学变化很小，那么取得突破的可能性就很明显了。目标得到了很好的解决，对这种设备的需求也得到了充分的说明。研究人员对拟议的工作有很好的背景，并证明了相当高的生产率。***

9622283 Carmen This Research Equipment Grant will broaden the scope of the research and education being conducted in Department of Mechanical, Aerospace and Nuclear Engineering at the University of California, Los Angeles. The purchase of an unique sputtering system capable of depositing thin film TiNi onto various substrates is novel & should yield interesting and important results. Developing a dedicated ultra-high-high vacuum this sputtering system in a clean- room facility with lithographic capability will provide a nationally unique facility for thin film research at UCLA. If the sputtering equipment can be controlled so that the chemistry variations are small then the potential for a breakthrough is clearly present. Objectives are well-addressed and the need for such equipment is adequately described. Researchers have an excellent background for the proposed work and have demonstrated considerable productivity. ***