Engineering Research Equipment: Piezoelectric Sensor Fabrication Equipment

9622501 Vetelino该提案要求NSF在购买压电传感器制造设备的成本份额，这将是至关重要的缅因州（UM）的大学传感器的努力和其他UM研究人员和行业的宝贵资产。 压电传感器的设计、制造和测试是UM的一个活跃领域。 这些传感器，这是敏感的，便携式的，小的，和廉价的，可以检测气体的部件每（SAW）气体微传感器，神经网络的应用SAW气体传感器，声板模式生物传感器，SAW腐蚀传感器，声发射传感器，传感器，使尼龙和汽车油质量传感器。 拟议的制造设备也是至关重要的大型NSF资助的多用户薄膜合成和处理设施和NSF资助的计划，将传感器集成到本科和研究生电气工程（EE）课程。 由于目前的制造设备是不可靠的，传感器的研究已经放缓，出现了障碍，探索新的研究方向，传感器的整合到课程一直很困难。 ***

9622501 Vetelino This proposal requests that NSF cost share in the purchase of piezoelectric sensor fabrication equipment which will be vital to the University of Maine (UM) sensor efforts and a valuable asset to other UM researchers and industry. The design, fabrication and testing of piezoelectric sensors is an active area at the UM. These sensors, which are sensitive, portable, small, and inexpensive, can detect gases in the parts per (SAW) gas microsensor, the application of neural networks to SAW gas sensors, an acoustic plate mode biosensor, a SAW corrosion sensor, an acoustic emission sensor, a sensor for making nylon and an automotive oil quality sensor. The proposed fabrication equipment is also critical to a large NSF-funded multi-user thin film synthesis and processing facility and an NSF funded program which integrates sensors into the undergraduate and graduate electrical engineering (EE) curricula. Since the present fabrication equipment is unreliable, sensor research has been slowed, impediments to exploring new research directions have arisen, and the integration of sensors into the curriculum has been difficult. ***