Investigation of atmospheric pressure filamentary discharges and its application for film deposition on inner surface of tubes, cavities and flat surfaces

在for 1123的第一阶段，开发了一种新的等离子体源，用于在常压条件下在长薄管内和表面上沉积薄膜。所述发育的等离子体可以在驱动电极和接地电极之间以引线型等离子体和在电极外部以子弹状等离子体分离。在氩气中加入少量甲烷混合物，引线放电在待涂覆管内点燃。在管内的先导区沉积了质量良好的非晶碳膜。在接地区域下，领导者变成了子弹。用最近发表的一种方法对先导等离子体进行了定量OES表征。在此基础上，建立了等离子体化学模型。在项目的下一阶段，我们将：1)将我们的OES方法与TALIF和吸收光谱进行比较，2)研究引子到子弹放电的时间和空间转换，3)分析子弹放电，4)评估梯级引子放电的点火，引子放电的分支。进一步，在更多的技术方面，我们将研究1)使用可移动接地电极的长管的均匀沉积，2)几个管同时沉积，3)有腔和没有腔的表面沉积。

A new plasma source for thin film deposition inside long thin tubes as well as on at surfaces at atmospheric pressure conditions has been developed in the first phase of the FOR 1123. The developing plasma may be separated in a leader-type plasma between the driven and the grounded electrode and a bullet-like outside the electrodes. Leader discharges in argon with small methane admixture are ignited inside the tube to be coated. Amorphous carbon films with good quality are deposited inside the tube within the leader region. Under the grounded area, the leader is transformed to a bullet-discharge. The leader plasma has been characterized by quantitative OES using a recently published method. On this basis, a plasma chemical model has been developed. In the next phase of the project we will: 1) compare our OES method with TALIF and absorption spectroscopy, 2) investigate the transformation of leader to bullet discharge time and space resolved, 3) analyze the bullet discharge and 4) evaluate the ignition of stepped leader discharge, the branching of leader discharge. Further on, under more technological aspects we will investigate 1) the homogenous deposition of long tubes using movable grounded electrodes, 2) of several tubes simultaneously and 3) of at surfaces with and without cavities.