Development of a Microelectronics Process Engineering Curriculum

本项目正在开发课程、实验室模块和教师发展研讨会，以支持跨学科课程，培养微电子和相关行业的bs级工艺工程师。该行业由制造和封装微电子产品，半导体设备，数据存储设备，平板显示器，分析服务和设备，传感器和执行器的公司组成，以及越来越多的公司制造用于片上生物和化学研究的微流体设备。该项目和课程的目标是满足行业对具有跨学科背景的学士学位工艺工程师的需求。课程的重点是过程工程，定义为开发，维护，监控和评估这些行业中使用的制造过程所需的工程资源。跨学科课程借鉴了传统的材料、化学、电气和工业工程课程。将课程、实习和项目结合在一起，整合和综合专业制造方法和制造知识。该项目的目标包括开发两个跨学科的高级实验室课程，开发低级实验室模块，以及为高中和社区大学教育工作者提供的教师发展计划。与当地工业和亚利桑那州坦佩的马里科帕先进技术教育中心（MATEC）存在重要的资金合作。正在设计一个由工业界资助的制造设施来支持该计划。拟议的课程填补了美国其他任何课程都无法满足的学士级工艺工程师的利基，并为其他大学在高科技领域的课程提供了一个模型。

Engineering - Materials Science (57) This project is developing courses, laboratory modules, and a faculty development workshop in support of an interdisciplinary curriculum to educate BS-level process engineers for microelectronics and related industries. This industry is comprised of companies which manufacture and package microelectronics products, semiconductor equipment, data storage devices, flat panel displays, analytical services and equipment, sensors and actuators, and increasingly, companies making microfluidic devices for onchip biological and chemical research. The goal of the project and the curriculum is to meet industry's need for bachelor's level process engineers with an interdisciplinary background. The focus of the curriculum is on process engineering, defined as the engineering resources needed to develop, maintain, monitor and evaluate the fabrication processes used in these industries. The interdisciplinary program draws from traditional materials, chemical, electrical and industrial engineering courses. Tying the program together are courses, internships and projects integrating and synthesizing specialized fabrication methods and manufacturing knowledge.The objectives of the project include the development of two interdisciplinary upper division laboratory courses, lower division laboratory module development, and a faculty development program for high school and community college educators. Significant funding collaborations exist with local industry and with the Maricopa Advanced Technology Education Center (MATEC) in Tempe, Arizona. An industry-funded fabrication facility is being designed to support the program. The proposed curriculum fills a niche for BS level process engineers that is not met by any other program in the U.S. and provides a model for programs at other universities in high technology areas.