Comparison of Sol-gel and Ion Beam Sputter Deposited Complex Oxide Thin Films

该项目专注于现场实时研究复合氧化物薄膜的成分、结构和性能，用于优化薄膜质量并开发优化所需薄膜性能的成膜模型。一套结合椭圆偏振光谱和低能离子散射的独特工艺和表征系统，以及用于薄膜生长的多靶离子束溅射沉积系统正在完成。这个涉及系统开发的目标项目不仅需要北卡罗来纳大学和詹姆斯·麦迪逊大学(本科院校)和阿贡国家实验室提供的多样化科学人才，还需要工业硬件实施阶段的行业参与。具有复杂成分和结构的氧化物薄膜被认为是下一代电子和光学器件。目前正在强调的材料类别包括高度优化的超导体薄膜、高介电常数介质、铁电材料和压电材料。培训学生在这些领域的就业机会被行业视为高度优先。%这项ROA拨款将增加詹姆斯麦迪逊大学本科生参与目标项目DMR-9986682。具有复杂成分和结构的氧化物薄膜正在被探索用于下一代电子和光学器件。这些材料包括超导体、绝缘体、铁电体和祖电前材料。这一目标将为在印达基视为高度优先的领域争夺100个机会的学生提供极好的培训。

This GOALI project focuses on in-situ, real-time studies of complex oxide thin films composition, structure, and properties to be used to optimize film quality and to develop film formation models that optimize desired film properties. A unique process and characterization system combining spectroscopic ellipsometry and low energy ion scattering, together with a multi target ion beam sputter deposition system for film growth is being completed. This GOALI project involving systems development requires not only the diverse scientific talents provided by the University of North Carolina and James Madison University (an undergraduate institution) and Argonne National laboratories, but also industrial participation for the industrial hardware implementation phase. Oxide films with both complex compositions and structures are being considered for the next generation electronic and optical devices. Among the classes materials currently being emphasized are highly optimized thin films of superconductors, high dielectric constant dielectrics, ferroelectrics and piezoelectrics. Training students for job opportunities in these areas is regarded as a high priority by industry.%%%This ROA grant will increase the participation of undergraduate students at James Madison University in GOALI project DMR-9986682. Oxide films with both complex composition and structures are being explored for the next generation electronic and optical devices. These include superconductors, didectrics, ferroelectrics and prezoelectric materials. This GOALI will provide excellent training for students competing for 100 opportunities in areas regarded as a high priority by indarky.