LCL: Analysis and Control of Microelectromechanical Systems (MEMS) in the Presence of Uncertainty

微机电系统在不确定性下的分析与控制。约翰逊安德鲁帕克帕纳约蒂斯帕多普洛斯机械工程系加州大学伯克利分校，CA 94720摘要材料性能和结构尺寸的不确定性在任何长度尺度上都是不可避免的，但随着器件变得越来越小，它们就变得尤为重要。 这项工作旨在确定和量化的来源和影响的固有的不确定性，在微机电系统（MEMS）。 将开发用于评估这种不确定性对整个系统响应的影响的方法。对于任何给定的设计，不确定性影响的定量界限将是可访问的，一旦实现了这一点，可以选择设计变量，使不确定性的影响最小化。将开发与现有分析包兼容的软件，包括有限元，这将允许在存在不确定性的情况下优化MEMS的设计。

Analysis and Control of MicroelectromechanicalSystems (MEMS) in the Presence of UncertaintyGeorge C. JohnsonAndrew PackardPanayiotis PapadopoulosDepartment of Mechanical EngineeringUniversity of CaliforniaBerkeley, CA 94720AbstractUncertainties in material properties and structural dimensions are unavoidable at any length scale, but they are particularly important as devices become smaller. This work seeks to identify and quantify the sources and effects of the inherent uncertainty in micro-electro-mechanical systems (MEMS). Methods for assessing the effects of this uncertainty on overall system response will be developed. Quantitative bounds on the effect of uncertainty for any given design will be accessible and, once this is achieved, design variables can be chosen that minimize the effects of the uncertainties. Software will be developed compatible with existing analysis packages, including finite elements, that will allow design optimization for MEMS in the presence of uncertainty.