Acquisition of an Electron Beam Lithography System for Nanoscience and Nanotechnology Research and Education

CTS-0116504MRI：收购用于纳米科学研究和教育的电子束光刻系统德克萨斯大学奥斯汀分校布赖恩·A·科格尔耗资784,000美元收购一套电子束光刻(EBL)系统(JEOL JBX-5000LS)，用于德克萨斯大学奥斯汀分校(德克萨斯大学奥斯汀分校)的纳米科学和纳米技术研究和教育。EBL是在尺寸为100 nm或更小的衬底上定义结构特征的标准方法。该EBL仪器将有助于在包括抗蚀剂材料开发在内的多个领域正在进行的研究，其中包括努力将EBL定义的结构用于微电子机械系统(MEMS-微流体和传感器)中的应用、电可擦除和可编程只读存储器(EEPROM)的表征，以及纳米结构(如硅纳米线和碳纳米管)中介观物理的基础研究。德克萨斯大学奥斯汀分校也是生物正极电子学领域的领先者，开发了用于电子材料处理的新的进化工程多肽，而接口EBL将有助于这些努力。收购EBL仪器将有助于促进一个环境，在这个环境中，具有不同背景的学生一起为未来的技术制造小型结构。德克萨斯大学奥斯汀分校作为一个机构，已经认识到现场EBL的迫切需要。德克萨斯材料研究所(TMI)、纳米和分子科学与技术中心(CNM)、微电子研究中心(MRC)、工程学院以及化学工程、化学、生物化学和物理系已承诺为购买仪器提供46.6万美元的配套资金，并以每年7万美元的工资支持一名全职技术人员。该仪器将通过MRC进行管理，并放置在德克萨斯大学奥斯汀分校Pickel研究园区的洁净室(100级和1000级空间，12,000平方英尺)，在那里它将极大地加强和补充现有的微制造和纳米制造设施。

CTS-0116504MRI: Acquisition of an Electron-Beam Lithography System for Nanoscience Research and EducationBrian A. KorgelUniversity of Texas Austin$784,000ABSTRACTAn electron beam lithography (EBL) system (JEOL JBX-5000LS) will be acquired for nanoscience and nanotechnology research and education at the University of Texas at Austin (UT Austin). EBL is the standard method for defining structural features on substrates with dimensions of 100 nm or less. This EBL instrument will aid ongoing research in a diverse range of fields including resist-material development, which includes efforts to use EBL-defined structures for applications in microelectromechanical systems (MEMS-both microfluidics and sensors), characterization of electrically erasable and programmable read-only memories (EEPROM), and fundamental studies of mesoscopic physics in nanostructures, such as silicon nanowires and carbon nanotubes. UT Austin is also a leader in the area of bionanoelectronics, with the development of new evolutionarily engineered peptides for electronic materials processing, and interfacing EBL will aid these efforts. The acquisition of the EBL instrument will help promote an environment where students with diverse backgrounds work together to make small structures for future technologies. UT Austin, as an institution, has recognized the critical need for on-site EBL. The Texas Materials Institute (TMI), the Center for Nano- and Molecular Science and Technology (CNM), the Microelectronics Research Center (MRC), the College of Engineering, and the Departments of Chemical Engineering, Chemistry and Biochemistry, and Physics have committed $466K in matching funds toward the instrument purchase along with support for a full-time technician at a salary of $70K per year. The instrument will be managed through the MRC and located in the cleanroom (12,000 square feet of class 100 and class 1000 space) at the Pickel Research Campus at UT Austin where it will greatly strengthen and complement the existing microfabrication and nanofabrication facilities.