Acquisition of an Ultra-high Vacuum Chamber for Etching Studies and Student Training

这笔赠款支持购买由涡轮分子阻力泵抽吸的超高真空(UHV)腔室。该小室将有一个质谱仪，一个俄歇电子能谱仪，以及一个用于分析设备的反射/吸收红外光谱仪。试验室还将有一个离子规、一把离子枪和一台XYZQ样品操纵器。该实验室目前无法进入特高压室。在没有特高压室的情况下，研究人员只能观察最终产物及其在低真空反应堆中的形成动力学。特高压室可以确定在表面形成什么中间物种，这反过来又导致对反应的更全面的了解。这对于研究确定b-二酮在不同表面上的反应路径是必要的。随着对反应的深入了解，研究人员可以开发出用b-二酮清洁蚀刻镍/铁合金、氧化铝和钨等表面的方法。这个特高压实验室将允许对研究生和本科生进行特高压技术培训，并将为特高压表面科学的学生提供新的机会。该项目将大大加强塔尔萨大学学生在表面科学方面的培训。

This grant supports the purchase of an ultra-high vacuum (UHV) chamber pumped by a turbomolecular drag pump. The chamber will have a mass spectrometer, an Auger electron spectrometer, and a reflection/absorption infrared spectrometer for analytical equipment. The chamber will also have an ion gauge, an ion gun, and a xyzq sample manipulator. The laboratory currently does not have access to a UHV chamber. Without a UHV chamber, the investigators can only observe the end products and the kinetics of their formation in a low-vacuum reactor. A UHV chamber allows determination of what intermediate species form on the surface, which in, turn, leads to a fuller understanding of the reactions. This is necessary for research to determine reaction pathways of b-diketones on various surfaces. With a deeper understanding of the reactions, the investigators can develop methods of cleanly etching surfaces such as nickel/iron alloys, alumina, and tungsten with b-diketones. This UHV chamber will permit the training of graduate and undergraduate students in UHV techniques and will provide new opportunities for students in UHV surface science. This project will greatly enhance the training of students in surface science at the University of Tulsa.