MRI: Acquisition of a Micro Scanning Vibrometer System

拟议活动的目标本提案的目标是获得Polytec PI微扫描振动计（MSV-300），用于伊利诺伊大学芝加哥分校（UIC）的研究和教育用途。微扫描振动计（MSV）是测量微机电系统（MEMS）结构挠度的理想仪器。该仪器采用最先进的激光技术和计算机软件驱动的数据采集系统，可以测量微小振动微结构上点的加速度、速度和位移，并提供微结构响应模态的三维动画。MSV包括双通道fft数据采集、光纤振动计传感器、显微镜适配器、压电扫描系统、远程控制功能和专用软件。提议活动的智力价值UIC三个工程系的四个实验室积极参与各种新型MEMS传感器开发的赞助研究项目，其中许多与UIC医学院的各个部门合作，这些项目对应于来自包括NSF在内的各种联邦机构的超过350万美元的赠款（无论是已资助的还是未决的）。这些新型MEMS项目的例子包括用于视网膜下假体的致动器和微流体装置，医疗诊断振动声传感器，多通道神经探针和液滴驱动微镜。这些MEMS的特征尺寸在几微米左右，谐振频率在几赫兹到几兆赫之间。所有这些研究项目的一个重要组成部分是系统动力学的识别，这提出了许多困难的挑战。由于这些结构的微观尺度，传统的动态表征方法是不可行的。在某些情况下，使用某些单点光学传感器可以进行粗频率评估；然而，它们对于获得试件的详细模态振型数据是不实用的。此外，它们受到带宽和分辨率的限制。目前，UIC或附近的机构没有仪器可以完全表征这些项目中MEMS结构的动态行为。拟议活动的更广泛影响拟议的设备将显著影响研究和教育质量，以及UIC的多样性计划，以及当地机构和私营公司的进步：研究MSV将使UIC研究人员能够获得高质量的mems结构模态数据，这是任何其他技术都无法实现的，因此，显著提高正在进行和预期的未来研究的质量。它还将有助于催化新的研究活动。该设备将用于提供尖端技术的实践指导，以补充在UIC动力学和MEMS测试领域计划的许多现有和新课程中讲授的课堂理论；这将极大地丰富教育质量。UIC在本科和研究生阶段都提供特殊课程，以吸引和指导科学和工程领域代表性不足的群体的成员。设备的可用性将进一步丰富这些项目中学生的教育。UIC的微加工应用实验室目前被来自大芝加哥地区几家当地学术机构和公司的50多个外部用户使用。许多用户对拟议的MSV表示了兴趣和需求。该设备将促进与当地工业的更多合作伙伴关系，促进MEMS/纳米技术的创新，并帮助当地企业为中西部地区的经济发展做出贡献。

The Objective of the Proposed ActivityThe objective of this proposal is to acquire the Polytec PI Micro Scanning Vibrometer (MSV-300)for research and educational use at the University of Illinois at Chicago (UIC). The MicroScanning Vibrometer (MSV) is an ideal instrument for mapping the deflections ofMicroelectromechanical Systems (MEMS) structures. Employing state-of-the-art lasertechnology and a computer software driven data acquisition system, the instrument can measureacceleration, velocity and displacement of points on tiny vibrating microstructures, and providelive 3-D animations of the response mode shapes of the microstructures. The MSV includes two-channelFFT data acquisition, a fiber-optic vibrometer sensor, microscope adapter, piezo-scanningsystem, remote control functions and specialized software.The Intellectual Merit of the Proposed ActivityFour laboratories in three engineering departments at UIC are actively involved in sponsoredresearch projects on development of a variety of novel MEMS transducers, many of them incollaboration with various departments in the UIC Medical school, that correspond to over$3.5M in grants (either funded or pending) from various federal agencies including NSF.Examples of these novel MEMS projects include actuators and microfluidic devices for sub-retinalprosthesis, medical diagnostic vibro-acoustic sensors, multi-channel neural probes, andliquid drop actuated micro-mirrors. The feature sizes of these MEMS are on the order of a fewmicrometers and their resonant frequencies are on the order of a few Hertz to several MHz. Avery important component central to all of these research projects is the identification of systemdynamics, which presents many difficult challenges. Due to the micro scale of these structures,conventional dynamic characterization methods are not feasible. Coarse frequency evaluationsmay be possible in some cases using certain single-point optical sensors; however, they are notpractical for obtaining detailed mode shape data of the test specimen. Additionally, they arelimited by bandwidth and resolution. Currently no instruments are available at UIC or nearbyinstitutions to fully characterize the dynamic behavior of MEMS structures in these projects.Broader Impacts of the Proposed ActivityThe proposed equipment will significantly impact the quality of research and education, anddiversity programs at UIC, and also the advancement of local institutions and private companies:Research MSV would enable UIC researchers to acquire high quality modal data in MEMSstructures that is not possible by any other technique, and thus, significantly enhance the qualityof the ongoing and anticipated future research. It would also help catalyze new research activity.Education The equipment will be used to offer hands-on instruction in cutting-edge technologyto supplement classroom theory taught in many existing and new courses planned in the areas ofdynamics and MEMS testing at UIC; this will highly enrich the quality of education.Diversity UIC offers special programs at both the undergraduate and graduate level to attract andmentor members of underrepresented groups in the sciences and engineering. The availability ofequipment would further enrich the education of students in these programs.Industry The Microfabrication Applications Laboratory at UIC is currently used by over 50external users from several local academic institutions and companies in the greater Chicagoarea. Many of the users have expressed interest and need for the proposed MSV. This equipmentwill foster more partnerships with local industry, promote innovation in MEMS/nanotechnology,and help local businesses to contribute to economic development in the Midwest.