NIRT: Nanocrystalline Diamond Thin Films for MEMS and Biomedical Devices

本研究的目标是制备出具有非常小的颗粒尺寸(5-10 nm)、较低的表面粗糙度(20-30 nm)和较小的内应力的纳米金刚石薄膜，并利用其在微电子机械系统(MEMS)和生物医学设备等领域的优异性能。研究重点将是：1)利用新型等离子体化学合成纳米结构(5-10 nm)金刚石薄膜；2)开发和应用先进的表征技术，在纳米尺度上了解该材料的机械和摩擦学性能；3)展示在高保真MEMS和生物医学设备等关键技术中的潜在应用；4)模拟对MEMS和生物应用至关重要的纳米金刚石薄膜的生长和所产生的特性。这个项目的基本原理是基于这样一个事实，即随着材料的颗粒尺寸减小到纳米级，材料的性质发生了巨大变化。通过在纳米尺度上控制薄膜的晶粒度和晶界结构，可以获得高硬度、高断裂强度、高杨氏模数、极低的摩擦系数和高的耐磨性、可忽略的粘结、低的残余应力等优异的材料性能。在更广泛的范围内，这项研究计划的成功完成将为设计新型纳米结构材料和器件创造一个知识库。NIRT项目将为跨学科背景下不同学科的研究生和本科生的研究、教育和培训提供一个独特的环境，国家实验室、行业和国际合作者积极参与。与会者的协同作用和互补的专业知识将使我们小组能够解决复杂的问题，并促进分享想法和成果。本科生和研究生将参与尖端研究工具的开发和使用，并将在纳米技术前沿接受出色的培训。将积极开展一项积极的教育和推广计划，将纳米技术带给大学预科学生、教师和普通公众。这项研究的一个基本和重要组成部分将是通过期刊上的出版物、在会议上的陈述和直接向合作者传播结果。这一NIRT计划将努力培养下一代科学家和工程师，他们将在推动21世纪纳米技术研究和开发方面发挥关键作用。

The objective of this research is to synthesize nanocrystalline diamond thin films with very small grain size (5-10 nm), lower surface roughness (20-30 nm) and less internal stress and utilize its extraordinary properties in various applications such as microelectromechanical systems (MEMS) and biomedical devices. The research focus will be: 1) to synthesize nanostructured (5-10nm) diamond thin films by using novel plasma chemistry; 2) to develop and apply advanced characterization techniques to understand mechanical and tribological properties of this material at the nanoscale; 3) to demonstrate potential applications in critical technologies including high fidelity MEMS and biomedical devices; 4) to model the growth and resulting properties of nanodiamond thin films important for MEMS and bioapplications. The rationale for this project is based on the fact that material properties change drastically as the grain size of the materials reduces to the nano-scale. By controlling the grain size and grain boundary structure at the nanoscale extraordinary materials properties will be achieved including high hardness, high fracture strength, high Young's modulus, extremely low friction coefficient and high wear resistance, negligible stiction, low residual stress in as-deposited films. On a broader scale, successful completion of this research program will lead to a knowledge base for design of novel nanostructured materials and devices. The NIRT projects will provide a unique environment for the research, education and training of graduate and undergraduate students from different disciplines in interdisciplinary setting with active participation of national laboratories, industry and international collaborators. The synergism and complementary expertise of the participants will allow our group to address complex problems and facilitate sharing of ideas and results. Undergraduate and graduate students will be involved in the development and use of cutting-edge research tools and will receive excellent training at the frontiers of nanotechnology. A vigorous education and outreach program will be aggressively pursued to bring nanotechnology to pre-college students, teachers and general public. An essential and important component of this research will be the dissemination of the results through publications in journals, presentation at meetings, and directly to collaborators. This NIRT program will strive to educate next generation of scientists and engineers that will play a key role in advancing nanotechnology research and development in 21st Century.