Fundamental Understanding of Lotus Effect and Its Application in MEMS Stiction Prevention

本文的研究目标是对新型荷花效应涂层有一个基本的认识，并将荷花效应涂层应用于微机械防粘系统中。莲花效应材料具有两个不可缺少的特性：超疏水性和自洁性，作为MEMS的防粘涂层具有很大的潜力。PI提出了制造莲花效应表面的新方法，包括通过等离子体在疏水表面创建纳米级粗糙度，以及在纳米孔衬底上涂覆功能自组装单分子膜。通过对表面形貌、表面润湿和表面附着力之间关系的数学模拟，研究了莲花效应材料的超疏水和自洁过程的基本机理。莲花效应涂层是仿生纳米材料的一个很好的例子。所提出的研究工作将丰富纳米表面工程的知识库，并有助于通过生物仿生工艺开发新材料。此外，超疏水自清洁涂料还将广泛应用于玻璃、陶瓷、纺织、建材、船舶、飞机、汽车等表面，以减少或消除常规清洗的工作量和费用，从而减少能源和洗涤剂的使用，从而造福于我们的社会和环境。这项学术与工业联系机会(GOALI)赠款在佐治亚理工学院和nGimat公司之间建立了产学联系，并将加强技术转让。

The research objectives of the proposed work are to achieve a fundamental understanding of the novel Lotus Effect coating, and to implement the Lotus Effect coating in microelectromechanical systems (MEMS) for stiction prevention. Possessing two indispensable characteristic properties: superhydrophobicity and self-cleaning, the Lotus Effect materials have a great potential as an anti-stiction coating for MEMS. The PI proposes novel approaches to produce Lotus Effect surfaces, including creating nanoscale roughness on a hydrophobic surface by plasma, and coating functional self-assembled monolayers on nanoporous substrates. The fundamental mechanism of the superhydrophobicity and the self-cleaning process of Lotus Effect materials will be studied through the mathematic modeling of the relationship between surface morphology, surface wetting, and surface adhesion. The Lotus Effect coating is an excellent example of bio-mimic nano-materials. The proposed research work will add to the knowledge base of the nano surface engineering and contribute to the progress of novel material development through bio-mimicking processes. In addition, the superhydrophobic and self-cleaning coatings will have wide applications on glass, ceramics, textiles, building materials, boat, airplane, automobiles and other surfaces, to reduce or eliminate the efforts and expenses of routine cleaning, as such, they will reduce the energy and detergent usages, and thus will benefit our society and environment. This Grant Opportunities for Academic Liaison with Industry (GOALI) grant provides an industrial-university linkage between Georgia Institute of Technology and nGimat Co. and will enhance technology transfer.