SGER: Exploratory Methods for Nanowire Fabrication on Insulating Substrates

摘要：约翰·N. Harb，Matthew R. Linford和Dean R. WheelerInstitution：Brigham Young UniversityProposal Number：0457370研究纳米器件和纳米电路需要无数的电互连，并且存在与这些纳米器件之间的电线的设计、制造和附着相关的重大且紧迫的问题。 随着光学光刻技术的发展，需要探索新的制造合适互连的方法。这些方法必须是经济和稳健的;也就是说，它们必须依赖于需要相对较少的工艺步骤并且可扩展到制造情况的化学和图案化方法。 这个探索性的项目将评估三种不同的方法在绝缘衬底上制造纳米线的可行性和潜在效用。这些包括电化学机械图案化（ECMP）、电化学光刻（ECL）和DNA模板金属化（MDT）。 所有这三种方法都涉及表面的局部化学改性，以创建所需图案的导电路径。 这些方法的不同之处在于局部表面化学性质的具体改变方式（化学机械、电化学或通过分子合成和放置）。 作为图案化策略的化学改性具有减少制造所需的工艺步骤的数量同时增加分辨率的潜力。 预计这种方法将对未来几代微电子器件产生影响，并立即在实验室中应用于开发包含大量新纳米材料的新型器件。 这项工作的更广泛的影响包括这项研究对新兴的纳米电子学领域的意义，以及研究生和本科生在涉及化学工程师，化学家和物理学家的多学科环境中从事尖端，高影响力研究的机会。

ABSTRACTPI: John N. Harb, Matthew R. Linford and Dean R. WheelerInstitution: Brigham Young UniversityProposal Number: 0457370ResearchNanodevices and nanocircuits require a myriad of electrical interconnections and there are significant and pressing problems related to the design, fabrication, and attachment of wires between and to these nanodevices. As the limits of optical lithography are approached, new classes of methods for fabricating suitable interconnects need to be explored. These methods must be economical and robust; that is, they must depend on chemistries and patterning methods that require relatively few process steps and are scalable to manufacturing situations. This exploratory project will assess the feasibility and potential utility of three different methods for nanowire fabrication on insulating substrates. These include electrochemomechanical patterning (ECMP), electrochemical lithography (ECL), and metallization of DNA templates (MDT). All three methods involve local chemical modification of a surface to create conducting paths in the desired pattern. The methods differ in the specific way that the local surface chemistry is modified (chemomechanically, electrochemically, or through molecular synthesis and placement). Chemical modification as a patterning strategy has the potential to reduce the number of process steps required for fabrication while increasing resolution. It is expected that such methods will have an impact on future generations of microelectronic devices, as well as immediate application in the laboratory for development of new types of devices that incorporate a host of new nanomaterials. Broad ImpactThe broader impacts of this work include the significance of this research for the emerging field of nanoelectronics, and the opportunity for both graduate and undergraduate students to work on cutting-edge, high-impact research in a multidisciplinary environment that involves chemical engineers, chemists, and physicists.