Lab-on-a-Chip Channels Novel Manufacturing Method

这项工作的研究目标是探索一种用于芯片实验室和微电子机械系统(MEMS)应用的微通道的新方法。该方法是基于受控的薄膜屈曲，形成分层起泡。这些机械活性特征是由于残余应力消除导致薄膜和衬底之间的局部粘附性丧失而形成的，并显示出定向生长。水泡的几何形状和路径将通过光刻蚀刻的附着力弱化层来控制，这些层勾勒出所需的面内水泡配置。离面尺寸将由薄膜的残余应力控制。薄膜和涂层的屈曲分层是一个真正的多尺度现象，因此宽度从几十纳米到厘米的特征是可能的。此外，从全面芯片集成的角度来看，与传统微电子工艺的兼容性非常有希望。将考虑流体传输机制以及设备的可靠性。计划包括学生在实验室工作，使用各种仪器和设备来制造微通道。如果成功，拟议中的研究将对纳米制造、MEMS和医学领域产生重大影响。拟议的方法将使微通道的成本效益高、多规模制造成为可能，从而最终实现稳健的制造过程。可能的应用包括药物输送、诊断设备和癌症早期检测。拟议的工作还将有助于为薄膜加工提供实验和分析工具。学生将获得宝贵的实验室经验和微流控制造技术知识。

The research objective of this effort is to investigate a novel method for manufacturing microchannels for lab-on-a-chip and Microelectromechanical Systems (MEMS) applications. The method is based on controlled thin film buckling, forming delamination blisters. These mechanically active features form by a local loss of adhesion between the film and the substrate due to residual stress relief, and exhibit directional growth. The geometry and path of the blisters will be controlled with lithographically-etched adhesion-weakening layers outlining the desired in-plane blister configuration. The out-of-plane dimensions will be controlled by the film residual stress. Thin film and coating buckling delamination is a truly multiscale phenomenon, so features ranging from tens of nanometers to centimeters in width are possible. In addition, compatibility with conventional microelectronic processing is very promising from the standpoint of full-scale on-chip integration. Fluid transport mechanisms, as well as the device reliability will be considered. Plans include students working in laboratory with a variety of instrumentation and equipment to fabricate the microchannels. If successful, the proposed research will greatly impact nano-manufacturing, MEMS, and medical fields. The proposed approach will enable cost-effective, multi-scale manufacturing of microchannels, leading to an ultimately robust manufacturing process. Possible applications include drug delivery, diagnostic devices and early cancer detection. The proposed work will also contribute to the experimental and analytical tools available for thin films processing. Students will gain valuable laboratory experience and knowledge of microfluidic fabrication techniques.