Tribology of Nano-patterned Surfaces

纳米图案化表面的摩擦学研究本研究的目标是对纳米图案化表面的摩擦学特性有一个基本的了解，以便为微电子机械系统(MEMS)和纳米电子机械系统(NEMS)设计具有最佳摩擦学性能的NPS。将采用独特的综合实验和建模方法，使用匹配的材料和长度标尺进行调查。其具体目标是：(1)通过实验研究NPS的摩擦学特性及其与表面纳米结构的关系，以及(2)开发多尺度模型以揭示与NPS的粘着、摩擦和磨损相关的基本机理。这项研究独一无二地将最先进的实验技术与先进的建模方法相结合，以揭示导致NPS所需摩擦学特性的潜在机制。这项研究是实现低粘着、低摩擦MEM/NEMS器件的重要一步。这项研究为培训学生在纳米摩擦学、多尺度建模和纳米制造等新兴领域提供了大量机会。这将提高美国未来在纳米技术领域的竞争力。

TRIBOLOGY OF NANO-PATTERNED SURFACESThe goal of this research is to gain a fundamental understanding of the tribological properties of nano-patterned surfaces (NPS) so as to design NPS with optimized tribological performances for micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS). A unique integrated experimental and modeling approach will be employed with matching materials and length scales for the investigation. The specific objectives are to: (1) investigate experimentally the tribological properties of NPS and their correlation to surface nanostructures, and (2) develop multiscale models to uncover the fundamental mechanisms related to the adhesion, friction, and wear of NPS. This research uniquely integrates state-of-the-art experimental techniques with advanced modeling methods to uncover the underlying mechanisms responsible for the desired tribological properties of NPS. The proposed research represents an important step toward the realization of low-adhesion and low-friction MEM/NEMS devices. This research offers abundant opportunities to train students in the emerging fields of nanotribology, multiscale modeling, and nanomanufacturing. It will improve the future competitiveness of the United States in the area of nanotechnology.