Chemical Microsystem based on Vertical Integration of Sensor Array and CMOS Circuitry

该提案的重点是基于微加工传感器阵列和CMOS电路的垂直集成的化学传感微系统的发展。在垂直集成方法中，单个传感器芯片或传感器阵列被结合到包含偏置、信号调节和通信电子器件的公共CMOS平台上。这样，电路和传感器元件可以各自使用最合适的技术制造。垂直集成极大地提高了设计灵活性，实现了高度模块化的传感系统，其组件可以在最终组装之前进行测试，同时保持传感器阵列和电路之间的短信号路径。拟议的工作地址（i）质量敏感的化学传感器阵列及其驱动和信号调理电路的设计和制造，（ii）必要的垂直集成和系统封装的工艺开发，（iii）不同识别膜的表征和局部沉积，以及（iv）微系统的应用测试。后者侧重于检测有毒空气污染物，特别是辨别化学相关的挥发性有机化合物。智力优势：所提出的工作的智力价值源于调查的限制，建议的垂直整合，以优化性能的小型化化学传感系统，从而更好地了解所涉及的系统方面。提出的膜特性的筛选提供了膜/分析物相互作用的基础知识，并形成了未来的聚合物传感膜的优化的基础。更广泛的影响：该研究项目的更广泛影响来自拟议化学微系统的可用性：（i）作为将最先进的微制造、传感器技术和系统工程方面与化学、生物学和医学中的应用相结合的教育工具，（ii）作为不仅适用于本工作中测试的应用，而且适用于大量当今化学和生物传感需求的传感平台，及（iii）为K-12学生举办外展活动。

This proposal focuses on the development of chemical sensing microsystems based on a vertical integration of microfabricated sensor arrays and CMOS circuitry. In the vertical integration approach, individual sensor chips or sensor arrays are bonded onto a common CMOS platform containing the biasing, signal conditioning and communication electronics. This way, circuitry and sensor elements can each be fabricated using the most appropriate technology. The vertical integration strongly increases the design flexibility, enables highly modular sensing systems whose components can be tested prior to the final assembly, while maintaining short signal paths between sensor array and circuitry. The proposed work addresses (i) the design and fabrication of mass-sensitive chemical sensor arrays and their driving and signal conditioning circuitry, (ii) the necessary process development for the vertical integration and system packaging, (iii) the characterization and localized deposition of different recognition membranes, and (iv) application testing of the microsystem. The latter focuses on the detection of toxic air pollutants and, in particular, the discrimination of chemically related volatile organic compounds. Intellectual Merit: The intellectual merit of the proposed work stems from the investigation of the limits of the proposed vertical integration in order to optimize the performance of miniaturized chemical sensing systems, leading to a better understanding of involved system aspects. The proposed screening of the membrane characteristics provides basic knowledge on the membrane/ analyte interaction and forms a base for future optimization of polymeric sensing membranes. Broader Impacts: The broader impact of the research project comes from the availability of the proposed chemical microsystem: (i) as an educational tool coupling state-of-the-art microfabrication, sensor technology and systems engineering aspects with applications in chemistry, biology and medicine, (ii) as a sensing platform applicable not only to the application tested in this work, but to a large number of today's chemical and biological sensing needs, and (iii) outreach activities to K-12 students.