Remote detection using microcantilever based sensor

基于微悬臂梁的传感器远程检测本研究的目标是开发一种高灵敏度和可靠的传感器模块，用于在恶劣环境中检测空气和液体介质中的分析物。该方法使用集成了挠度传感器的谐振式微悬臂梁传感器。悬臂将在真空封闭环境中工作，与外部官能化层通过静电相互作用，吸附空气或液体介质中的分析物分子，并导致表面电位的变化。这种方法在国防和国土安全、工业过程监测、环境监测和医疗诊断方面具有广泛的应用潜力。智能优点：所提出的结构采用非接触检测方法，允许功能层与谐振微悬臂梁分离，谐振微悬臂梁可以在真空中封闭，从而大大提高了其灵敏度和可靠性。GaN微悬臂梁与AlGaN/GaN压阻式挠度传感器集成在一起，形成了适合在恶劣环境下工作的高灵敏度传感器。在硅片上生长的AlGaN/GaN外延层的使用使在一块芯片上集成谐振传感器、换能器和信号发射器成为可能。广泛的影响：该项目的教育和推广活动包括开发一个关于微电子机械(MEMS)传感器的研究生课程，让本科生和高中生参与研究活动，招募少数族裔，以及开发一个基于MEMS的传感信息丰富的网站。研究活动还将涉及行业合作，这些合作可以开辟令人兴奋的III-V氮化物的新应用，从而产生重大的经济影响。

Remote detection using microcantilever based sensorThe objective of this research is to develop a highly sensitive and reliable sensor module for detection of analytes in harsh environments in air and liquid media. The approach uses a resonant microcantilever sensor with integrated deflection transducer. The cantilever will operate in a vacuum enclosure interacting electrostatically with external functionalization layers that adsorb analyte molecules in air or liquid media and result in a change in surface potential. This approach has the potential for wide ranging applications in defense and homeland security, industrial process monitoring, environmental monitoring, and medical diagnosis.Intellectual Merit:The proposed structure utilizes a non-contact detection method allowing the functionalization layer to be separated from the resonant microcantilever, which can be enclosed in vacuum leading to a dramatic increase in its sensitivity and reliability. A GaN microcantilever integrated with an AlGaN/GaN piezoresistive deflection transducer results in a highly sensitive sensor suitable for operation in harsh environments. The usage of AlGaN/GaN epitaxial layers grown on Si wafer leads to possibility of integrating the resonant sensor, transducer, and signal transmitter on a chip.Broader Impacts:The educational and outreach activities of the project include development of a graduate course on microelectromechanical (MEMS) sensors, involvement of undergraduate and high school students in research activities, minority recruitment, and development of a highly informative website on MEMS based sensing. The research activities will also involve industrial collaborations that can open up exciting new applications of III-V Nitrides leading to significant economic impacts.