Novel Nanostructured ZnO Gas Sensors on (100) Si Wafers

摘要本研究的目的是开发与CMOS工艺兼容的、能够在室温下工作的、具有高灵敏度、高响应性和高特异度的纳米结构的氧化锌硅基多气体传感器。其方法是：(A)通过纳米结构和薄的催化金属接触来增加传感器的表面；(B)通过引入场辅助？通过纳米结的传感过程，以及(C)通过调节场辅助过程。在纳米技术和纳米设备物理学的几个基本问题上，在纳米结构的物理和电子性质(表面积、表面态、表面反应性、量子限制)以及对气体探测过程的场辅助效应方面，智能优势很高。它首次提出了基于氧化锌-硅纳米结的新型纳米传感器的开发，以实现室温、高灵敏度、高响应性、多气体操作和CMOS偏置和读出电路的单片集成。更广泛的影响将是环境安全、质量和安保，特别是在新生儿护理、不稳定的爆炸物、有毒和危险环境等关键环境中，这些环境需要快速、灵敏的检测。它将影响人们对电气工程教育的看法和教学方式，使其成为一个真正的多学科领域，为社会发展的方方面面做出贡献，与从医学到环境、化学和生物的每个关键领域相互联系。更多代表不足的群体和少数族裔学生将被吸引，因为它本身就提供了更多的实践经验，在以应用为导向的环境中，学生可以看到他们对环境质量和安全工作的贡献。这反映在通过拟议的Marquee课程和暑期培训计划，让未被充分代表的群体本科生参与传感器和芯片设计。

AbstractThe objective of this research is to develop nanostructured ZnO on Si multi-gas sensors capable of room temperature operation with high sensitivity, responsivity, and specificity, compatible with CMOS technology. The approach is to substantially increase the performance capabilities of the sensor (a) by increasing sensor surface through nanostructures and thin catalytic metal contacts, (b) by introducing a ?field assisted? sensing process through nanojunctions, and (c) by conditioning the field assisted process. The intellectual merit is high in several fundamental issues in the physics of nanotechnology and nano-devices, in the physical and electronic properties of the nanostructures (surface area, surface states, surface reactivity, quantum confinement), and the field-assisted effects to gas detection processes. It addresses for the first time the development of novel nanosensors based on ZnO-Si nano-junctions to achieve room temperature, high sensitivity, high responsivity, multi-gas operation monolithically integrated with CMOS biasing and read-out circuitry. The broader impact will be in environmental safety, quality and security, in particular in critical environments such as neonatal care, unstable explosive, toxic and hazardous environments, where rapid, sensitive detection is needed. It will impact the way Electrical Engineering Education is perceived and taught by making it a truly multidisciplinary field contributing in all aspects of developments in society, interlinked with every critical area from medical to environmental, chemical and biological. More underrepresented groups and minority students will be attracted as it inherently offers more hands-on experience in an application oriented environment where the students can see their contribution to the work in environmental quality and safety. This is reflected by involving underrepresented group undergrad students in the sensor and CMOS chip design, through the proposed Marquee courses and Summer Training Programs.