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XYZ on a Chip: CMOS Compatible Self-Assembled ZnO Polymeric Nanostructures on Chip for Sensor Imaging and Light Emission Technology

XYZ on a Chip: CMOS Compatible Self-Assembled ZnO Polymeric Nanostructures on Chip for Sensor Imaging and Light Emission Technology
片上 XYZ:用于传感器成像和发光技术的片上 CMOS 兼容自组装 ZnO 聚合物纳米结构
批准号:
9980794
负责人:
Agisilaos Iliadis
金额:
$44.13万
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
1999
资助国家:
美国
项目状态:
已结题
起止时间:
1999-09-15 至 2004-01-31

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中文摘要
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英文摘要
9980794IliadisThe goal of this Engineering Microsystems: "XYZ" on a chip project is to investigate sound wave sensor imaging technology, and ultra violet (UV) light emission technology, by developing selective application of self-assembled diblock copolymer metal-oxide nanostructures on CMOS based chips for direct signal retrieval and signal processing. The project is based on the development of novel devices consisting of a nanocomposite MOSFETstructure integrated with arrays of block copolymer oriented cylindrical (hexagonal) ZnO nanocrystalline structures of varying dimensions and spacing emulating the cochlea of the ear, and a nanocomposite light emitting Si/ZnO diode for UV surface light emission. The sensing imaging capability of the proposed device and chip technology, is based on the enhanced piezoelectric properties of nanoconfined ZnO and its successful interfacing with the mature and well developed Si CMOS technology, while the UV light emission is based on the enhanced nanocavity emission of the ZnO nanocrystalline structures.For the development of such technology they propose:The development of the diblock copolymer with self-assembled ZnO nanocrystalline structures.The development of processing technology compatible with that of Si and the copolymer chemistry, for the successful integration of the nanocrystalline structures in the devices.The "proof of concept" development of the novel nanocomposite MOSFETsound wave imaging sensor device, and the novel nanocomposite UV-light emitting diode.In the course of this investigation they expect to substantially enhance their knowledge in the:Piezoelectric, electrical, and optical properties of nanoconfined crystalline structures, with and without the polymer matrix.The processing of copolymer nanocrystalline structures on Si, and the properties of composite Si devices.***
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