XYZ on a Chip: CMOS Compatible Self-Assembled ZnO Polymeric Nanostructures on Chip for Sensor Imaging and Light Emission Technology

片上 XYZ：用于传感器成像和发光技术的片上 CMOS 兼容自组装 ZnO 聚合物纳米结构

• 批准号: 9980794
• 负责人: Agisilaos Iliadis
• 金额: $ 44.13万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-09-15 至 2004-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9980794&HistoricalAwards=false
• 关键词: XYZ; Chip; CMOS; Compatible; Self

9980794IliadisThe goal of this Engineering Microsystems: "XYZ" on a chip project is to investigate sound wave sensor imaging technology, and ultra violet (UV) light emission technology, by developing selective application of self-assembled diblock copolymer metal-oxide nanostructures on CMOS based chips for direct signal retrieval and signal processing. The project is based on the development of novel devices consisting of a nanocomposite MOSFETstructure integrated with arrays of block copolymer oriented cylindrical (hexagonal) ZnO nanocrystalline structures of varying dimensions and spacing emulating the cochlea of the ear, and a nanocomposite light emitting Si/ZnO diode for UV surface light emission. The sensing imaging capability of the proposed device and chip technology, is based on the enhanced piezoelectric properties of nanoconfined ZnO and its successful interfacing with the mature and well developed Si CMOS technology, while the UV light emission is based on the enhanced nanocavity emission of the ZnO nanocrystalline structures.For the development of such technology they propose:The development of the diblock copolymer with self-assembled ZnO nanocrystalline structures.The development of processing technology compatible with that of Si and the copolymer chemistry, for the successful integration of the nanocrystalline structures in the devices.The "proof of concept" development of the novel nanocomposite MOSFETsound wave imaging sensor device, and the novel nanocomposite UV-light emitting diode.In the course of this investigation they expect to substantially enhance their knowledge in the:Piezoelectric, electrical, and optical properties of nanoconfined crystalline structures, with and without the polymer matrix.The processing of copolymer nanocrystalline structures on Si, and the properties of composite Si devices.***

9980794 Iliadis这个工程微系统公司的目标：“XYZ”芯片项目是研究声波传感器成像技术，和紫外线（UV）光发射技术，通过开发选择性应用的自组装二嵌段共聚物金属氧化物纳米结构的CMOS为基础的芯片直接信号检索和信号处理。 该项目的基础上开发的新型设备组成的纳米复合材料的MEMS结构集成了不同尺寸和间距的嵌段共聚物取向的圆柱形（六角形）ZnO纳米晶体结构的阵列模拟耳蜗的耳朵，和纳米复合材料的发光Si/ZnO二极管的UV表面光发射。 所提出的器件和芯片技术的传感成像能力是基于纳米限制的ZnO的增强的压电特性及其与成熟且发展良好的Si CMOS技术的成功接口，而UV光发射是基于ZnO纳米晶体结构的增强的纳米腔发射。具有自组装ZnO纳米晶结构的二嵌段共聚物的开发。与Si和共聚物化学相容的加工技术的开发，成功地将纳米晶体结构集成到器件中。新型纳米复合材料MEMS声波成像传感器器件和新型纳米复合材料UV发光二极管的“概念验证”开发。在这项研究过程中，他们希望大大提高他们在以下方面的知识：纳米限制晶体结构的压电、电学和光学性质， 研究了共聚物纳米晶结构在Si上的制备及复合Si的性能 设备。*