XYZ on a Chip: CMOS Compatible Self-Assembled ZnO Polymeric Nanostructures on Chip for Sensor Imaging and Light Emission Technology

9980794 Iliadis该工程微系统公司的目标是：“XYZ”芯片项目旨在研究声波传感器成像技术和紫外线(UV)发光技术，通过在基于芯片的芯片上开发选择性地应用自组装的两嵌段共聚物金属氧化物纳米结构，用于直接信号提取和信号处理。该项目基于新型器件的开发，包括集成了嵌段共聚物取向的圆柱形(六角形)氧化锌纳米晶结构阵列的纳米复合MOSFET结构，以及模拟耳朵耳蜗线的不同尺寸和间距的纳米复合发光硅/氧化锌二极管，以及用于紫外线表面发光的纳米复合发光硅/氧化锌二极管。所提出的器件和芯片技术的传感成像能力是基于纳米受限的氧化锌的增强的压电性及其与成熟和发达的硅CMOS技术的成功接口，而紫外光发射是基于氧化锌纳米晶体结构的增强的纳米腔发射。为了开发这种技术，他们提出：开发具有自组装的氧化锌纳米晶结构的两嵌段共聚物。为了成功地将纳米晶结构集成在器件中，开发与硅和共聚物化学相兼容的加工技术。新型纳米复合MOSFET声波成像传感器器件的开发，以及新型纳米复合紫外光发光二极管。在这项研究过程中，他们希望在有和没有聚合物基质的情况下，显著提高他们在纳米受限晶体结构的压电、电学和光学性质方面的知识。在硅上的共聚纳米晶结构的加工，以及复合硅器件的性能。

9980794IliadisThe goal of this Engineering Microsystems: "XYZ" on a chip project is to investigate sound wave sensor imaging technology, and ultra violet (UV) light emission technology, by developing selective application of self-assembled diblock copolymer metal-oxide nanostructures on CMOS based chips for direct signal retrieval and signal processing. The project is based on the development of novel devices consisting of a nanocomposite MOSFETstructure integrated with arrays of block copolymer oriented cylindrical (hexagonal) ZnO nanocrystalline structures of varying dimensions and spacing emulating the cochlea of the ear, and a nanocomposite light emitting Si/ZnO diode for UV surface light emission. The sensing imaging capability of the proposed device and chip technology, is based on the enhanced piezoelectric properties of nanoconfined ZnO and its successful interfacing with the mature and well developed Si CMOS technology, while the UV light emission is based on the enhanced nanocavity emission of the ZnO nanocrystalline structures.For the development of such technology they propose:The development of the diblock copolymer with self-assembled ZnO nanocrystalline structures.The development of processing technology compatible with that of Si and the copolymer chemistry, for the successful integration of the nanocrystalline structures in the devices.The "proof of concept" development of the novel nanocomposite MOSFETsound wave imaging sensor device, and the novel nanocomposite UV-light emitting diode.In the course of this investigation they expect to substantially enhance their knowledge in the:Piezoelectric, electrical, and optical properties of nanoconfined crystalline structures, with and without the polymer matrix.The processing of copolymer nanocrystalline structures on Si, and the properties of composite Si devices.***