Development of ZnO Thin Films and Nanostructures on CMOS Wafers for Gravimetric Biosensors and "Touch" Pressure Sensors

用于重量生物传感器和“触摸”压力传感器的 CMOS 晶圆上的 ZnO 薄膜和纳米结构的开发

• 批准号: 0601481
• 负责人: Agisilaos Iliadis
• 金额: $ 24万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-05-01 至 2010-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0601481&HistoricalAwards=false
• 关键词: Development; ZnO; Thin; Films; Nanostructures

Proposal: ECS0601481Development of ZnO Thin films and Nanostructures on CMOS Wafers for Gravimetric Biosensors and Touch Pressure Sensors The objective of this research is to develop ultra-high sensitivity biosensor arrays capable of detecting single protein molecules in air and liquid environments, and touch pressure nanocomposite CMOS based sensors for artificial skin applications. The approach is to use emerging promising materials like ZnO having important surface and piezoelectric properties, study and improve the properties of the bio-ZnO interface, and the nanostructured ZnO-SiO2 system, and develop high quality epitaxially grown thin ZnO films on the technologically important dissimilar substrate of SiO2 and Si, as well as innovative surface acoustic wave based sensing technology, and ZnO nanostructured CMOS based pressure sensors. Intellectual merit: The development of such advanced sensor technology will impact socio-economic areas crucial to the country. The area of health care by improving detection of pathogens and monitoring of illnesses at substantially reduced time and cost, the area of environmental monitoring of hazardous biomaterials in vivo and in the field by early warning detection for effective conflict resolution, protecting population and soldiers, the area of prosthetic limp and permanent nerve damage patients, by developing touch pressure sensor arrays for artificial skin in prosthetic limp patients, and provide the sense of pain to paraplegic patients. Broader Impact: This technology has a broad economic impact on two fronts. First by saving money and time on bio-analysis, and second on creating a new high tech industry for integrated sensor technologies providing a substantial number of jobs for college graduates. These engineering and science graduates will be highly skilled as they benefit from the educational development resulting from the fundamental knowledge of the interfacing of biomaterials with inorganic semiconductors, and the parameters involved in developing such integrated sensor technology. They will represent an important asset contributing to maintain the high technology leadership of the country.

提案：ECS 0601481开发用于重力生物传感器和触摸压力传感器的CMOS晶片上的ZnO薄膜和纳米结构本研究的目的是开发能够检测空气和液体环境中的单个蛋白质分子的超高灵敏度生物传感器阵列，以及用于人工皮肤应用的触摸压力纳米复合CMOS传感器。该方法是使用新兴的有前途的材料，如具有重要表面和压电特性的ZnO，研究和改善生物-ZnO界面的特性，以及纳米结构的ZnO-SiO2系统，并在技术上重要的SiO2和Si的异质衬底上开发高质量的外延生长的ZnO薄膜，以及创新的基于表面声波的传感技术，和基于ZnO纳米结构CMOS的压力传感器。 智力价值：这种先进传感器技术的发展将影响对国家至关重要的社会经济领域。在保健领域，改进病原体检测和以大大减少的时间和费用监测疾病;在环境监测领域，对体内和实地的危险生物材料进行监测，通过预警检测，有效解决冲突，保护民众和士兵;在假肢跛行和永久性神经损伤患者领域，通过开发用于假肢跛行患者的人造皮肤的触摸压力传感器阵列，并为截瘫患者提供疼痛感。更广泛的影响：这项技术在两个方面产生了广泛的经济影响。首先是节省了生物分析的金钱和时间，其次是创造了一个新的高科技产业，为大学毕业生提供了大量的就业机会。这些工程和科学专业的毕业生将具有很高的技能，因为他们受益于生物材料与无机半导体的接口的基础知识所带来的教育发展，以及开发这种集成传感器技术所涉及的参数。它们将是有助于保持该国高技术领先地位的重要资产。