Synthesis of Crystalline Carbon Nitride by Simultaneous Vibrational and Electronic Excitations

本研究的主要目标是开发一种新的方法，实现前驱体分子的振动态和活性自由基的电子态同时共振激发，以控制和促进晶体氮化碳（C3N4）薄膜的沉积。项目目标是：1)通过实验和理论的协调研究，建立双共振激发化学气相沉积（re - cvd）工艺的基础科学；2)控制涂层过程，优化沉积膜的化学计量；3)改善沉积膜的结晶；4)表征涂层材料以支持工艺开发。成功实施将对前体分子和活性自由基共振激发激光控制化学过程的科学研究以及功能薄膜沉积领域产生重大影响。这种方法提供了实现具有可控成分、高能量耦合效率和对基材低热影响的表面涂层的潜力。在应用方面，该方法有望提供一种新的方法，将材料沉积在各种基材上作为功能涂层，以增强、改善和优化基材性能。这些研究活动将与教育目的相结合，包括将研究中获得的新知识整合到纳米技术课程中，培训和指导研究生和本科生，包括来自代表性不足群体的学生，以及为K-12学生和教师举办研讨会。研究结果将以在线出版物、期刊论文、年度K-12研讨会、动画工具包和会议报告等方式传播给科学界、工业界、公众和教育界。这个项目最终将通过新的和先进的电子、生物医学和机械应用和产品造福社会。

The primary goal of this research is to develop a new approach to realize simultaneous resonant excitations of vibrational states of precursor molecules and electronic states of reactive radicals to control and promote the deposition of crystalline carbon nitride (C3N4) thin films. The project objectives are to: 1) establish the basic science governing dual-resonance-excitation chemical vapor deposition (DRE-CVD) processes through coordinated experimental and theoretical investigations; 2) control the coating processes for optimization of stoichiometry in deposited films; 3) improve crystallization in deposited films; and 4) characterize coating materials to support process development.Successful implementation will have significant impact on scientific research of laser-controlled chemical processes by resonance excitation of precursor molecules and reactive radicals, as well as in the field of functional thin film deposition. This proposed approach provides the potential to realize surface coatings with controlled compositions, high energy-coupling efficiency, and low thermal impact on substrates. For applications, the proposed method is expected to provide a novel approach to material deposition on various substrates as functional coatings to enhance, improve, and optimize the substrate properties. The research activities will be integrated with educational purposes, including integrating new knowledge gained in the research in a nanotechnology course, training and mentoring of graduate and undergraduates including those from underrepresented groups, and seminars for K-12 students and teachers. Results will be disseminated to scientific, industrial, public and educational communities in ways including online publications, journal papers, annual K-12 seminars, an animation kit, and conference presentations. This project will ultimately benefit society through new and advanced electronic, biomedical, and mechanical applications and products.