MRI-R2 Consortium: Acquisition of an Electron Beam Lithography System to Support Transformative Device and Materials Research in the Greater Houston Area

该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的。目的：该资助申请的目的是获得电子束光刻（EBL）系统，以支持休斯敦大都市区的纳米纤维研究。休斯顿拥有众多研究密集型大学，德克萨斯医学中心和活跃的工业研究。该系统将安装在休斯顿大学，该大学拥有大休斯顿地区唯一的共享制造资源。此次收购将建立在现有的工具集上，并为广泛的用户群提供最先进的纳米加工能力，从而将休斯顿的纳米科学研究提升到具有全球竞争力的水平。收购专用EBL系统将加强广泛的联邦资助的材料和设备计划的变革性研究，包括纳米磁性设备，生物传感器，药物/基因递送，电阻RAM，垂直电子器件、化学放大成像材料、纳米照相术、磁性纳米收缩、纳米线互连、纳米级光源、纳米力学、微流体和纳米结构自旋电子器件。更广泛的影响：收购EBL将增强休斯顿大学（UH）、德克萨斯大学健康科学中心（UTHSC）和莱斯大学（Rice University）60多名学生的教育体验。 团队成员将EBL培训纳入他们所在机构的教育计划，包括水稻的综合研究生教育和研究培训;本科生在UH和水稻的研究经验; UH教师的研究经验;研究生教育联盟和UH和水稻的教授;奖励刺激和支持水稻的本科研究教育;和UH的纳米技术本科教育。

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).Objective: The objective of this grant application is to acquire an electron beam lithography (EBL) system to support nanofabrication research in the Houston metropolitan area. Houston is home to numerous research-intensive universities, the Texas Medical Center, and active industrial research. The system will be installed at the University of Houston, which houses the only shared fabrication resources in the Greater Houston area. This acquisition will build on the existing tool set and provide state-of-the-art nanofabrication capabilities to a broad user base, thereby elevating nanoscience research in Houston to a globally competitive level.Intellectual Merit: Acquisition of a dedicated EBL system will enhance transformative research across a wide range of federally-funded materials and device programs, including nanomagnetic devices, biosensors, drug/gene delivery, resistive RAM, vertical electronic devices, chemically-amplified imaging materials, nanopantography, magnetic nanoconstrictions, nanowire interconnects, nanoscale light sources, nanomechanics, microfluidics, and nanostructured spintronic devices. The enabling EBL capabilities will stimulate development of new research programs.Broader Impacts: The EBL acquisition will enhance the educational experience of more than 60 students at the University of Houston (UH), University of Texas Health Science Center (UTHSC), and Rice University. Team members will incorporate EBL training into educational programs at their home institutions, including Integrative Graduate Education and Research Traineeship at Rice; Research Experiences for Undergraduates at UH and Rice; Research Experiences for Teachers at UH; Alliances for Graduate Education and the Professoriate at UH and Rice; Awards to Stimulate and Support Undergraduate Research Education at Rice; and Nanotechnology Undergraduate Education at UH.