Renovation of Stanford Nanofabrication Facility

该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的。该项目是翻新斯坦福大学纳米工厂（SNF），这是一个开放使用的，共享的设施和参与网站在NSF资助的国家纳米技术基础设施网络（NNIN）。 自1987年纳米工厂开业以来，SNF的100级洁净室（10，500平方英尺）每年全天候运行50周。 除了每年两周的停工外，洁净室设施100%用于研究和研究培训。 随着其大量使用和快速变化的纳米纤维的工具箱，SNF需要进行翻新和更新，以提供纳米纤维的灵活性，可靠性和能力，这是如此大量的内部和外部用户进行纳米科学和纳米工程研究所需的。该项目计划要求进行一系列的翻新任务，包括更新湿化学处理能力，更新工艺气体处理和排气通风系统，更新配电系统，更新工艺冷却水，并实现温度和湿度控制的现代化。 研究设施空间将更新，包括两个专门的加工区域，一个灵活的微加工室和一个纳米合成设施。 这些领域将用于扩大SNF的纳米制造能力，并更好地支持跨学科研究计划。 支持研究目标的纳米纤维活动的例子包括制造用于分子中电子转移速率的基础研究的纳米结构电极，用于生物传感的硅纳米线的生产，用于更高性能电池和燃料电池的纳米线电极的生长，以及基于碳纳米管和石墨烯的新型纳米电子学的创造。翻新后的设施将吸引越来越广泛的学术和工业研究人员从物理科学和生命科学到自然科学基金，使他们能够解决新的科学问题，并采取新的方法来开发技术。 仅在2008年，就有581名研究人员来到SNF，为他们在电子，光学，MEMS，NEMS，生物和化学方面的研究制造纳米结构。 在一个典型的月里，SNF为大约240名研究人员提供服务，其中大约50名来自工业界，大约20名来自其他大学。 研究文化的交叉施肥和跨学科科学的追求将继续点燃创新和创新的革新SNF和提高研究生和本科教育的质量为学生用户。

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).The project is to renovate the Stanford Nanofabrication Facility (SNF), which is an open-use, shared facility and a participating site in the NSF-funded National Nanotechnology Infrastructure Network (NNIN). Since the nanofabrication facility opened in 1987, the SNF's Class 100 clean room (10,500 sq ft) has operated around the clock for 50 weeks per year. With the exception of the annual two-week shutdown, the clean room facility has been used for research and research training 100% of the time. With its heavy usage and the rapidly changing toolbox for nanofabrication, the SNF needs to be renovated and updated to provide the flexibility, reliability, and capacity in nanofabrication that is needed by such a large set of internal and external users conducting research in nanoscience and nanoengineering.The project plan calls for a series of renovation tasks including updating the wet chemical handling capability, renovating the process gas handling and exhaust ventilation systems, updating the electrical distribution, updating the process cooling water, and modernizing the temperature and humidity controls. The research facility space will be updated to include two specialized processing areas, a flexible micromachining room and a nanosynthesis facility. These areas will be used to expand the nanofabrication capability of the SNF and better support interdisciplinary research programs. Examples of nanofabrication activities supporting research goals include fabricating nanostructured electrodes for fundamental studies of electron transfer rates in molecules, production of silicon nanowires for biological sensing, growth of nanowire electrodes for higher performance batteries and fuel cells, and creation of novel nanoelectronics based on carbon nanotubes and graphene.The renovated facility will attract an increasingly broader base of academic and industrial researchers from the physical sciences and the life sciences to SNF, enabling them to address new scientific questions and adopt new approaches to technology development. In 2008 alone, 581 researchers came to the SNF to fabricate nanostructures for their research in electronics, optics, MEMS, NEMS, biology, and chemistry. In a typical month, the SNF serves about 240 researchers, including about 50 from industry and about 20 from other universities. The cross-fertilization of research cultures and pursuit of interdisciplinary science will continue to ignite creativity and innovation in the renovated SNF and enhance the quality of graduate and undergraduate education for student users.