GOALI: Lateral-Mode MEMS Filter Arrays on Ultrananocrystalline Diamond for Multi-Band Communication

本研究的目的是通过提出创新的解决方案来显著推动MEMS滤波器领域的发展，以解决高插入损耗、低功率处理和有限带宽等阻碍MEMS滤波器广泛应用的问题。我们的方法是利用高耦合系数的薄膜压电材料和新的阻抗匹配技术来提高声耦合单片滤光器的性能，这种滤光片是在超纳米金刚石(UNCD)衬底上制造的。智能价值这项研究有望克服目前MEMS滤波器的局限性，建立横向模式MEMS滤波器，作为新兴的多频段收发器的可行候选者。具体而言，本文的研究意义如下：建立了能够完全反映压电微机械滤波器频率响应的有限元模型。UNCD被用来提高MEMS滤波器的频率和改善功率处理。阻抗匹配网络与UNCD上的薄膜压电滤波器集成在一起。开发了在UNCD上直接沉积高耦合系数压电薄膜的新工艺。广泛影响本工作中提出的低损耗薄膜压电-UNCD滤波器的成功演示将对未来射频收发机结构的设计产生重大影响。这项提案将为俄亥俄州立大学的研究生和本科生(优先考虑来自代表性不足的群体的学生)提供机会，与工业科学家合作，并在先进钻石技术公司的工业环境中获得经验。该项目的结果将通过在著名会议上的陈述和在高影响力的期刊上发表来传播。

ObjectiveThe objective of the proposed research is to significantly advance the field of MEMS filters by putting forward innovative solutions that tackle the issues hindering widespread deployment of MEMS filters such as high insertion loss, low power handling, and limited bandwidth. Our approach is to exploit high-coupling-factor thin-film piezoelectric materials in combination with novel impedance matching techniques to improve the performance of acoustically-coupled monolithic filters, which are fabricated on ultra-nanocrystalline diamond (UNCD) substrates. Intellectual MeritThis research is expected to overcome current limitations of MEMS filters and establish lateral-mode MEMS filters as a viable candidate for emerging multi-band transceivers. Specifically, the significance of the proposed activities is as follows: Finite element models are developed that can fully capture the frequency response of a piezoelectric MEMS filter. UNCD is utilized to scale up the frequency and improve the power handling of MEMS filters. Impedance matching networks are integrated with thin-film piezoelectric-on-UNCD filters. Novel processes for direct deposition of high-coupling-factor piezoelectric films on UNCD are developed.Broader Impacts The successful demonstration of low-loss thin-film piezoelectric-on-UNCD filters proposed in this work will have a significant impact on how future RF transceiver architectures will be designed. This proposal will provide opportunities for OSU graduate and undergraduate students (with priority given to students from under-represented groups) to work with industrial scientists and gain experience in an industrial setting at Advanced Diamond Technologies Inc. Results from the project will be disseminated through presentation in prestigious conferences and publication in high-impact journals.