EAGER: Investigation and Optimization of Thermoelectric Properties of Highly-Doped Polysilicon Nanowires

EAGER：高掺杂多晶硅纳米线热电性能的研究和优化

• 批准号: 1418704
• 负责人: Reza Abdolvand
• 金额: $ 14.41万
• 依托单位: The University of Central Florida Board of Trustees
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2014
• 资助国家: 美国
• 起止时间: 2014-01-01 至 2017-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1418704&HistoricalAwards=false
• 关键词: EAGER; Investigation; Optimization; Thermoelectric; Properties

The objective of this project is to develop a robust fabrication process for manufacturing micro-structures that will be used to measure the thermoelectric properties of polysilicon nanowires and subsequently to generate guidelines for optimizing the thermoelectric figure of merit in polysilicon nanowires. The effect of size, deposition parameters, and doping type/concentration on the figure of merit will be studied. The intellectual merit is in filling the existing knowledge gap about thermoelectric properties of polysilicon nanowires. Such nanowires have an immediate application in developing high-performance IR sensors. Despite earlier reports on enhanced thermoelectric properties of silicon nanowires, there has been no report of practical thermoelectric devices that function based on such superior properties. This is mainly due to the complex process of growth and transfer of silicon nanowires, which hinders the batch-fabrication of such devices. The results of this research can potentially transform this status since polysilicon nanowires can be fabricated through conventional microfabrication processes and nanoscale lithography. This creates a unique opportunity for production of novel thermoelectric devices that take advantage of enhanced properties of nanowires.The broader impact is envisioned in enabling low-cost and high-performance IR detectors with widespread usage in military, civilian, and medical diagnostic applications, where cost effective solutions with adequate performance do not exist. The funds received for the proposed research activities will also allow the PI to recruit and train local talents with priority given to underrepresented minorities and also will produce material for graduate level courses on micro/nano-systems.

该项目的目的是开发一个可靠的制造过程，用于制造微观结构，该过程将用于测量多硅纳米线的热电特性，然后以随后生成用于优化多元素纳米线中功绩热电图的准则。将研究大小，沉积参数和掺杂类型/浓度对功绩图的影响。知识分子的优点在于填补有关多硅纳米线热电特性的现有知识差距。这样的纳米线在开发高性能IR传感器时立即应用。尽管较早地报道了硅纳米线增强的热电性能，但仍未有实际的热电设备的报道，这些设备基于这种出色的特性。这主要是由于硅纳米线的生长和转移的复杂过程，这阻碍了这种设备的批量制作。这项研究的结果可能会改变这种状态，因为可以通过常规的微加工过程和纳米级光刻来制造多硅纳米线。这为生产新型热电设备的生产创造了独特的机会，利用纳米线的增强性能。在实现军事，平民和医疗诊断应用中，具有广泛使用的低成本和高性能IR探测器，在不存在适当效果的情况下，设想了更广泛的影响。针对拟议的研究活动收到的资金还将允许PI优先招募和培训当地人才，并优先考虑代表人数不足的少数群体，还将为Micro/Nano-Systems的研究生水平课程生产材料。