Integrating High Frequency Whispering-Gallery-Mode Phononic Cavities with Efficient Electrically-Small Antennas: Pushing the Limits of Wireless Passive Micro-Sensing

将高频耳语廊模式声子腔与高效电小天线集成：突破无线无源微传感的极限

• 批准号: 1711632
• 负责人: Reza Abdolvand
• 金额: $ 38万
• 依托单位: The University of Central Florida Board of Trustees
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-08-01 至 2021-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1711632&HistoricalAwards=false
• 关键词: Integrating; Frequency; Whispering; Gallery; Mode

This project aims to explore and combine novel micro-scale resonator designs with extremely small antennas to build a wireless sensing platform that does not require power sources and takes advantage of the economy scale in delivering exceptional performance at very low price-points. This platform, once realized, is believed to make a significant impact on medical sensing paradigms by offering flexibility in remote and nonintrusive measurement of patients vital signs. Despite the tremendous technological progress made in the field of microelectronics during the past few decades, there exists a gap between the scale of sensing apparatus used in medical industry and the state-of-the-art in the field of miniaturized sensors. Specifically, the devices monitoring respiration rate and breathing pattern are inconvenient for the patients due to excessive wiring. The platform proposed in this project can significantly scale down the size of the equipment required for monitoring breathing rate. The same technology can be adapted for continuous monitoring of the temperature (including the core body temperature), the heart rate, blood pressure, oxygen intake, etc. without the need for changing the battery. The data collection can be achieved by a simple and small gadget that could communicate with smartphones. The principal investigators are participating in the NSF-supported Career Advancement Mentoring Program for Young Entrepreneur and Scholars Program (CAMP-YES) and the Research and Mentoring Activities (RAMA) program at the University of Central Florida, both of which promote research experience for underrepresented undergraduate students. The resources developed in this project will assist the principal investigators in furthering their contributions to these programs by recruiting students to engage in this research. The main objective of this project is to enable extremely-small wireless passive sensors by exploring exceptionally high quality factor (Q) piezoelectric-based high-frequency resonators integrated with ultra-small highly-efficient antennas. In this work, for the first time, whispering-gallery mode phononic cavities in a piezoelectric-on-ultrananocrystalline diamond platform will be demonstrated with the goal of achieving high coupling factor and high quality factor at high frequencies around 1 GHz. The whispering gallery mode is chosen to evade the anchor-loss (a major source of energy loss) and the diamond substrate is chosen to minimize the effect of internal friction losses at high frequencies. Such large values of coupling and Q could enable extremely-small size ( 1 cm x 1 cm including the antenna) wireless sensors with a readout range of a few meters. The tasks include: 1) Studying the physics of loss in high frequency piezoelectric-on-diamond resonators, 2) Implementation of whispering-gallery mode phononic cavities in the thin-film piezoelectric-on-diamond platform, 3) Integration of the phononic cavities with highly-efficient electrically-small antennas to develop passive wireless sensors. Such sensors can be orders of magnitude smaller than other wireless sensors operating at similar frequencies. Successful demonstration of extremely small wireless sensors targeted in this project will have a significant impact on a wide range of remote sensing applications including medical health monitoring and diagnosis, environmental monitoring, and industrial control.

该项目旨在探索和将新颖的微型谐振器设计与极小的天线结合起来，以建立一个无需电源的无线传感平台，并利用经济规模以非常低的价格点提供出色的性能。该平台曾经意识到，据信，通过在患者的远程和非感官测量中提供灵活性，对医学感测范式产生了重大影响。尽管在过去几十年中，微电子学领域取得了巨大的技术进步，但在医疗行业中使用的传感器的规模与微型传感器领域的最先进之间存在差距。具体而言，由于过度接线，监测呼吸率和呼吸模式的设备对于患者而言是不方便的。该项目中提出的平台可以显着缩小监测呼吸速率所需的设备尺寸。可以对相同的技术进行调整，以连续监测温度（包括核心体温），心率，血压，氧气摄入等，而无需更换电池。数据收集可以通过一个可以与智能手机通信的简单小工具来实现。首席研究人员正在参加NSF支持的年轻企业家和学者计划（CAMP-YES）以及中央佛罗里达大学的研究与指导活动（RAMA）计划（RAMA）的职业发展指导计划（RAMA），这两者都促进了代表性不足的本科生的研究经验。该项目中开发的资源将通过招募学生从事这项研究来帮助主要研究人员对这些计划的贡献。 该项目的主要目的是通过探索与超小高效高效天线集成的基于极高的高质量因子（Q）基于压电的高频谐振器来启用极高的无线无源传感器。在这项工作中，首次在压电上的粉丝式粉状型钻石平台中首次在压电上的语音型腔中，以在1 GHz左右的高频下实现高耦合因子和高质量因子的目的。选择了窃窃库模式以逃避锚固损失（主要能量损失），并选择钻石底物以最大程度地减少高频内摩擦损失的影响。如此庞大的耦合和Q值可以使极其小的尺寸（1 cm x 1 cm，包括天线）无线传感器，其读数范围为几米。任务包括：1）研究高频压电在二叉子琴上的损失物理学，2）在薄膜压电启动钻机上的窃窃私语 - 戴上语音模式的窃窃私语模式腔内的实施，3）将声音腔与高效的电气电气型电气安装式安装式无线电传感器相结合。此类传感器的数量级可能比以类似频率运行的其他无线传感器小。成功演示该项目中针对的极小无线传感器将对广泛的遥感应用程序产生重大影响，包括医疗健康监测和诊断，环境监测和工业控制。

项目成果

Very High-Q Resonant MEMS for Liquid-Phase Bio-Sensing

用于液相生物传感的极高 Q 值谐振 MEMS

• 发表时间: 2019
• 期刊: Proceedings of the IEEE Frequency Control Symposium
• 作者: Mansoorzare, Hakhamanesh;Moradian, Sina;Abdolvand, Reza
• 通讯作者: Abdolvand, Reza

Inadequacy of Third-Order Elastic Coefficients for Predicting Nonlinearity in Highly n-Type-Doped Silicon Resonators

三阶弹性系数不足以预测高 n 型掺杂硅谐振器的非线性

• DOI: 10.1109/ted.2019.2961946
• 发表时间: 2020
• 期刊: IEEE Transactions on Electron Devices
• 影响因子: 3.1
• 作者: Khazaeili, Beheshte;Abdolvand, Reza
• 通讯作者: Abdolvand, Reza

Achieving the Intrinsic Limit of Quality Factor in VHF Extensional-Mode Block Resonators

• DOI: 10.1109/fcs.2018.8597472
• 发表时间: 2018-05
• 期刊: 2018 IEEE International Frequency Control Symposium (IFCS)
• 作者: Hakhamanesh Mansoorzare;Sina Moradian;S. Shahraini;R. Abdolvand;J. Gonzales

Thickness-Lamé Thin-Film Piezoelectric-on-Silicon Resonators

厚度 Lamé 薄膜压电硅谐振器

• DOI: 10.1109/jmems.2020.2972779
• 发表时间: 2020
• 期刊: Journal of Microelectromechanical Systems
• 影响因子: 2.7
• 作者: Shahraini, Sarah;Mansoorzare, Hakhamanesh;Mahigir, Amirreza;Abdolvand, Reza
• 通讯作者: Abdolvand, Reza

Side-Supported Radial-Mode Thin-Film Piezoelectric-on-Silicon Disk Resonators

侧支撑径向模式薄膜硅压电盘谐振器

• DOI: 10.1109/tuffc.2019.2893121
• 发表时间: 2019
• 期刊: and Frequency Control
• 作者: Shahraini, Sarah;Shahmohammadi, Mohsen;Fatemi, Hedy;Abdolvand, Reza
• 通讯作者: Abdolvand, Reza