MRI: Acquisition of True 3D Laser Lithography System with Sub-Micrometer Resolution

非技术：本次活动的目的是获得Nanoscribe 3D激光光刻系统（Photonic Professional GT），并将其安装在哈佛大学纳米系统中心（CNS）。作为新英格兰地区最大的纳米技术共享设施中心，CNS目前支持1400多名用户（包括学术和工业），研究兴趣从生物工程和微流体到量子光学和燃料电池。我们多样化的研究人群，工作范围广泛的材料和结构，有三维结构制造的需求。然而，目前在CNS中可用的传统纳米制造技术本质上是平面的，并且仅限于实现二维结构。Nanoscribe 3D克服了这一限制，并允许制造复杂的、分层的、跨越大范围长度尺度的结构，这是传统纳米制造技术无法实现的。凭借其对纳米级光学和电子学，仿生，微流体和组织工程等领域的吸引力，Nanoscribe 3D促进了物理学家，化学家，生物学家，材料科学家和工程师之间的跨学科合作，并为各级学生（本科生，研究生和研究生）的不同人群提供了良好的教育机会。技术：目前制造3D结构的方法是基于使用标准平面技术的逐层制造序列。这种方法成本高，耗时长，在连续的光刻步骤之间有严格的对齐要求，并且不能产生任意的3D几何形状。Nanoscribe 3D利用了紧聚焦飞秒激光束焦点上的多光子吸收过程，可以实现横向分辨率为~100nm、纵向分辨率为~200nm的真正三维结构。在光学研究方面，该工具用于实现自下而上合成的纳米材料（纳米线、量子点等）与自上而下定义的光子元件（包括光栅、空腔、光子晶体和超材料）相结合的混合中尺度结构。仿生学研究感兴趣的是，复制复杂生物结构的能力至关重要，并且可以更深入地了解这些结构的功能形态，包括结构颜色。细胞和组织工程研究受益于该工具？能够实现微米级细节的厘米级支架，以及其他结构。最后，Nanoscribe 3D允许有效地制造3D纳米电子阵列，可用于测量细胞外和细胞内的生物信号（例如，来自心脏和神经细胞和组织）。

Non-technical: The purpose of this activity is the acquisition of a Nanoscribe 3D laser lithography system (Photonic Professional GT) and its installation in the Center for Nanoscale Systems (CNS) at Harvard University. As the biggest shared facility center of nanotechnology in New England area, CNS is currently supporting more than 1,400 users (both academic and industrial) with research interests ranging from bio-engineering and micro-fluidics to quantum optics and fuel cells. Our diverse research population, working with wide range of materials and structures, has a need for fabrication of three-dimensional structures. Conventional nanofabrication techniques currently available in CNS, however, are planar in nature and are limited to realization of two-dimensional structures only. Nanoscribe 3D overcomes this limitation, and allows for fabrication of complex, hierarchical, structures spanning wide range of length scales, that cannot be realized using conventional nanofabrication techniques. With its appeal to area as diverse as nanoscale optics and electronics, bio-mimetic, microfluidics and tissue engineering, Nanoscribe 3D promotes interdisciplinary collaborations between physicists, chemists, biologists, material scientists and engineers, and enables excellent educational opportunities for a diverse population of students at all levels (undergraduate, graduate and post-graduate).Technical: Current methods for fabrication of 3D structures are based on a sequence of layer-by-layer fabrication using standard planar techniques. This approach is costly, time-consuming, suffers from stringent alignment requirements between successive photolithography steps, and cannot produce arbitrary 3D geometries. Nanoscribe 3D takes advantage of multi-photon absorption processes that occur in the focal spot of tightly focused femto-second laser beam and can realize true 3D structures with ~100nm lateral and ~200nm vertical resolution. For optics research, the tool is used to realize hybrid meso-scale structures that combine bottom-up synthesized nano-materials (nanowires, quantum dots, etc) with top-down defined photonic components, including gratings, cavities, photonic crystals and meta-materials. Of interest to biomimetics research, ability to replicate complex biological structures is crucial, and enables deeper understanding of the functional morphology of these structures, including structural colors. Cell and tissue engineering research benefits from the tool?s ability to realize cm-sized scaffolds with micron-scale detail, as well as other structures. Finally, Nanoscribe 3D allows for efficient fabrication of 3D nanoelectronic arrays that can be used to measure extracellular and intracellular biological signals (e.g. from cardiac and neural cells and tissues).