PFI-TT: Multi-Channel Probe System for Multi-Functional Atomic Force Microscopy

这个PFI项目的更广泛的影响/商业潜力是将原子力显微镜（AFM）探针市场从单通道转变为多通道探针。原子力显微镜是纳米尺度分辨率材料成像和表征最有力的工具之一，它推动了纳米/生物科学技术的广泛发展。虽然AFM组件的所有其他方面都有了显著的改进，但在过去的30多年里，AFM探针的设计并没有从简单的矩形或三角形光束改变。所提出的AFM探针可以将其功能从单通道扩展到多通道探针，这样它可以很容易地用于各种AFM方案，以表征地形以外的多物理性质。因此，AFM用户可以毫不费力地实现先进的多功能AFM方案与最小的模糊性，复杂性和工件，通过简单地使用这种新的AFM探针。拟议的创新将推动美国AFM行业和依赖AFM利用的行业的市场地位。作为一个无与伦比的和多功能的工具，发现许多科学和技术领域的重要基础，原子力显微镜的进步将导致进一步的科学发现和新技术。拟议的项目旨在克服与可制造性、可靠性和可重复性相关的技术障碍，以加速商业化。用于性能演示的原型装置是通过使用基于聚焦离子束（FIB）的铣削工艺和转移打印组装技术修改市售AFM悬臂来单独制造的。为了将新的AFM探针技术转化为有前景的商业现实，我们需要解决重要的技术和商业障碍。因此，本提案的主要目标是(i)开发新探针设计的批量制造工艺，（ii）探针设计的拓扑优化，以保证在广泛的操作参数范围内的可靠性和性能稳健性，（iii）在PI实验室以外的客户设置中演示新探针设计的功能，以及（iv）开发商业化战略和执行计划。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

The broader impact/commercial potential of this PFI project is to bring a paradigm change in the Atomic Force Microscopy (AFM) probe market from a single-channel to multi-channel probe. AFM is one of the most powerful tools to image and characterize materials with nanometer scale resolution, leading to the extensive development of nano-/bio- science and technology. While there has been a significant improvement in all other aspects of AFM components, the AFM probe design has not changed from a simple rectangular or triangular beam over the past 30+ years. The proposed AFM probe can extend its functionality from a single-channel to multi-channel probe such that it can be easily employed in various AFM schemes to characterize multi-physical properties beyond topography. Thus, AFM users can effortlessly implement the advanced multi-functional AFM schemes with minimal ambiguity, complications, and artifacts, by simply employing this new AFM probe. The proposed innovation will forward the market position of the US AFM industry and the industries that rely on AFM utilization. As an unmatched and versatile tool to uncover important fundamentals in many areas of science and technology, the advancement of AFM will lead to further scientific discoveries and new technologies.The proposed project aims to overcome the technical barriers related to manufacturability, reliability, and repeatability in order to accelerate commercialization. The prototype device used for performance demonstration was individually fabricated by modifying a commercially available AFM cantilever with a focused ion beam (FIB) based milling process and transfer-printing assembly technique. In order to transform the new AFM probe technology into a promising commercial reality, we need to address the important technical and commercial hurdles. Therefore, the main objectives of this proposal are (i) development of a batch manufacturing process for the new probe design, (ii) topology optimization of the probe design to guarantee the reliability and performance robustness over the wide range of operating parameters, (iii) demonstration of the functionality of the new probe design in customer settings beyond the PI's laboratory, and (iv) development of commercialization strategy and execution plans.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.