MRI: Acquisition of a variable angle spectroscopic ellipsometer

此次收购的可变角度光谱椭圆计（花瓶）将为纽约州罗切斯特地区的许多研究项目提供无与伦比的薄膜表征能力。研究项目的例子包括用独特的化学气相沉积技术沉积聚合物薄膜的热物理性质的基础研究，生物医学设备中响应涂层的原位表征，光子器件中二维材料的综合表征，以及用于高功率激光应用的光学涂层材料的激光诱导损伤研究。来自罗切斯特大学、罗切斯特理工学院和激光能量学实验室的12个研究小组已被确定为花瓶工具的用户。为了进一步促进花瓶工具的有效利用，使其成为广泛可访问的资源，它将被安装在罗切斯特大学校园的一般用户设施中。花瓶工具的另一个关键功能是支持学生教育，为他们在光学，半导体和光子学领域的潜在职业做好准备。所提出的光谱椭偏法将用于各种光学性质的薄膜材料。米勒矩阵椭偏测量米勒矩阵的所有16个元素，这是对介质对偏振光响应的最完整描述。这使得能够定量分析具有复杂结构的样品，如光学各向异性和去极化样品，同时保留标准的椭偏能力，这足以用于同位素，非去极化样品。要获得的具体仪器是RC2椭偏仪，它具有额外的增强功能，以最大限度地提高其通用性，并使多学科研究工作成为可能。它们包括用于绘制图案表面和/或评估薄膜均匀性的自动平移阶段，用于测量相对于入射偏振的几个角度的各向异性样品的旋转阶段，用于动态测量水合（溶剂化）薄膜的液体电池，表征薄膜性能作为温度函数的热阶段，用于在受控蒸汽气氛中测量薄膜的环境电池。一种用于耦合原位电化学器件表征的电化学电池。RC2椭偏仪的大样品台和灵活的物理配置将允许未来定制原位表征能力的发展，确保该仪器在未来许多年的研究项目中的广泛应用。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

The variable angle spectroscopic ellipsometer (VASE) to be acquired will provide unparalleled thin film characterization capabilities for a host of research projects in the Rochester, NY region. Examples of research projects include the fundamental study of thermophysical properties of polymer thin films deposited by a unique chemical vapor deposition technique, in situ characterization of responsive coatings in biomedical devices, comprehensive characterization of two-dimensional materials for photonic devices, and the study of laser-induced damage in optical coating materials for high power laser applications. Twelve research groups from the University of Rochester, Rochester Institute of Technology, and the Laboratory for Laser Energetics have been identified as users of the VASE tool. To further promote effective utilization of the VASE tool and make it widely accessible resource, it will be installed in a general user facility on the University of Rochester campus. Another key function of the VASE tool is to support student education to prepare them for potential careers in optics, semiconductors and photonics.The proposed spectroscopic ellipsometry will be utilized for thin film materials of varied optical properties. Mueller-matrix ellipsometry measures all 16 elements of the Mueller matrix, which is the most complete description of a medium's response to polarized light. This enables quantitative analysis of samples with complex structure, such as optically anisotropic and depolarizing samples, while retaining standard ellipsometry capabilities, which are sufficient for isotopic, non-depolarizing samples. The specific instrument to be acquired is the RC2 ellipsometer, with additional enhancements to maximize its versatility and to enable multidisciplinary research efforts. They include an auto-translating stage for mapping of patterned surfaces and/or to assess film uniformity, rotational stage to measure anisotropic samples at several angles relative to the incident polarization, liquid cell for dynamic measurements of hydrated (solvated) films, thermal stage to characterize film properties as a function of temperature, environmental cell to measure films in controlled vapor atmospheres, and an electrochemical cell for coupled in situ electrochemical device characterization. The large sample stage and flexible physical configuration of the RC2 ellipsometer will allow future development of custom in situ characterization capabilities, ensuring the broad utility of this instrument in research projects for many years to come.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.