STTR Phase I: CMOS integrated piezoelectric vapor sensors

小型企业创新研究(SBIR)第一阶段项目的更广泛影响/商业潜力是通过检测有毒化学品来提高安全性。有毒化学品在许多部门都存在风险；例如石油和天然气工业、食品质量监测、废物管理优化、农业病虫害，甚至用于疾病检测的呼气分析。该项目将推动低成本、低功率蒸汽传感系统的开发，最初的重点是威胁检测和空气质量监测市场。这个小型企业技术转移第一阶段项目提出了一种高灵敏度、微型制造的功能化传感器。该结构直接在CMOS体声谐振器上制作高频体声谐振器，实现了低成本大规模生产，改善了传感器的噪声特性。这种直接集成简化了体系结构，允许抑制电噪声，还可以制造高度特定的传感器阵列。该项目的研究目标包括接收器评估、谐振器制造、接收器集成和传感器测试，以在相关应用中表征该系统。该奖项反映了NSF的法定使命，并通过使用基金会的智力优势和更广泛的影响审查标准进行评估，被认为值得支持。

The broader impact/commercial potential of this Small Business Innovation Research (SBIR) Phase I project is to improve safety by detecting toxic chemicals. Toxic chemicals present risks in many sectors; examples include the oil and gas industry, food quality monitoring, waste management optimization, agricultural pest infestations, and even breath analysis for disease detection. This project will advance the development of a low-cost, low-power vapor sensing system, with an initial focus on the threat detection and air quality monitoring market. This Small Business Technology Transfer Phase I project proposes a high sensitivity, micro-fabricated functionalized sensor. The proposed architecture fabricates a high-frequency bulk acoustic resonator directly on CMOS integrated circuits, enabling low-cost mass production and improves the noise characteristics of the sensor. This direct integration simplifies the architecture and allows for suppressed electrical noise and also enables fabrication of an array of highly specific sensors. The project's research objectives include receptor evaluation, resonator fabrication, receptor integration, and sensor testing to characterize the system in relevant applications.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.