NSF-DFG: Advances in Ion-Surface Interaction-Driven Manufacturing of One-Dimensional Metal Oxide Heterostructures

该补助金支持在许多应用领域，如生物医学传感和量子技术所需的大面积纳米结构阵列的制造研究。该研究有利于通过离子束表面相互作用形成纳米结构的科学进步。在该制造过程中，在倾斜入射角下在表面处的组合原子和电离粒子撞击用于可控地形成三维纳米结构的阵列。广泛的材料和元素组合可用于该制造工艺中，从而导致纳米结构形成的多功能性。该方法将提供对物理和化学结构的控制措施，该物理和化学结构目前限制了所得元素组成、纳米结构几何形状和形状的范围。使用多个离子束与选定的元素组成和动力学性质的选择相结合，广泛地扩展了用于纳米结构制造的材料的范围。这项研究填补了三维纳米材料制造的空白，以实现精确的几何形状和元素控制。具有改进的形状和材料成分控制和精度的新纳米材料将实现新的应用，例如光子学，能量收集或生物传感。这项研究将通过为设备应用提供新材料，使美国的经济和社会受益。该补助金支持利用和解决制造，等离子体物理，材料科学和数值方法的国际合作研究。在由美国国家科学基金会和德国国家科学基金会共同资助的联合项目下，与德国合作者的战略合作加速了进展和研究成果。国际交流和跨学科的方法支持工程劳动力培训，并有助于扩大在科学和教育中代表性不足的群体的参与。掠射角沉积是一种多功能的自下而上的技术，可以创建三维纳米结构，而不需要包括昂贵和耗时的光刻和蚀刻工艺。这项工作解决了宽面积纳米结构形成和随后的技术使用的限制，这是由于结构扇形化，这是扩大结构厚度或直径随着高度的增加，缺乏控制的结构布置在整个基板表面和不充分的控制化合物组合物的相关氧化物，氮化物和碳化物。离子处理通过利用离子侵蚀进行初始衬底图案化、反应离子辅助生长以形成具有精确化学计量的化合物以及离子束成形以限制扇形化并改善结构均匀性来克服这些障碍。这项研究将调查机制，确定在掠射角沉积过程中使用计算驱动的实验方法的低能离子处理的影响。该研究小组将进行离子辅助制造和材料改性实验，这些实验由基于蒙特卡罗的模拟支持，以探索纳米尺度上的离子表面驱动相互作用。该实验的特点是在原位光学过程控制和有限元为基础的动态建模，以探讨离子的影响，在材料制造过程中在真实的time.This奖项反映了NSF的法定使命，并已被认为是值得的支持，通过评估使用基金会的智力价值和更广泛的影响审查标准。

This grant supports research into the manufacture of large area arrays of nanostructures needed in many application areas such as biomedical sensing and quantum technologies. The research benefits the advancement of science associated with the formation of nanostructures through ion beam surface interactions. In this manufacturing process, the combined atom and ionized particle impingement at the surface under oblique angle of incidence is used to controllably form arrays of three-dimensional nanostructures. A wide spectrum of materials and elemental combinations can be used in this manufacturing process leading to a versatility in nanostructure formation. This process would provide a measure of control over the physical and chemical structure which currently limits the range of resulting elemental compositions, nanostructure geometries and shapes. The use of multiple of ion beams combined with selected elemental compositions and choice of kinetic properties widely extends the range of materials for nanostructure manufacturing. This research closes a gap in three-dimensional nanomaterials fabrication to achieve precise geometrical shape and elemental control. The new nanomaterials with improved shape and material composition control and precision will enable new applications, for example in photonics, energy harvesting, or biosensing. This research will benefit the economy and society of the United States through enabling new materials for device applications. The grant supports an international collaborative study utilizing and addressing manufacturing, plasma physics, materials science, and numerical methods. A strategic alignment with German collaborators under a joint program co-funded by both the National Science Foundation and the German National Science Foundation accelerates the progress and research outcomes. International exchange and interdisciplinary approaches support engineering workforce training and serves to broaden participation of underrepresented groups in science and education.Glancing angle deposition is a versatile bottom-up technique to create three-dimensional nanostructures without the inclusion of expensive and time-consuming lithographic and etching processes. This work addresses current limitations for broad area nanostructure formation and subsequent technical use which result from structure fanning, which is the broadening of structure thickness or diameter with increasing height, lack of controlled structure arrangements across a substrate surface and insufficient control over compound compositions for relevant oxides, nitrides, and carbides. Ion processing overcomes these barriers by utilizing ion erosion for the initial substrate patterning, reactive ion-assisted growth for compound formation with precise stoichiometry and ion beam figuring to limit fanning and improve structure homogeneity. The research will investigate mechanisms which determine the influence of low-energy ion processing during glancing angle deposition using a computationally driven experimental approach. The research team will perform experiments for ion-assisted manufacturing and material modification supported by Monte Carlo based simulations to explore ion-surface driven interactions on the nanoscale. The experiments are characterized by in situ optical process control and finite element based dynamic modeling to explore the impact of ions during material fabrication in real time.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.