Robust Control of Electrostatic Microactuators

本提案旨在解决与静电微致动器相关的一些基本问题，静电微致动器是微机电系统（MEMS）的一个组成部分。这些微执行器的性能是有限的，由于在其动力学中存在一种特殊形式的非线性。在本研究中，将开发先进和创新的反馈控制器来改善微执行器的操作性能。全球MEMS市场预计将从2005年的100亿美元增长到2015年的400亿美元。该项目将提升澳大利亚在这一重要高科技领域的地位。

This proposal seeks to address a number of fundamental problems associated with electrostatic microactuators that form an integral part of microelectromechanical systems (MEMS). Performance of these microactuators is limited due to the presence of a specific form of nonlinearity in their dynamics. In this research advanced and innovative feedback controllers will be developed to improve operational performance of such microactuators. The global MEMS market is projected to increase from $10B in 2005 to $40B in 2015. This project will enhance Australia's standing in this important high-tech field.