High-precision Pico-AFM for nanometrology and nanofabrication

该项目的目标是一种具有主动探头的高精度Pico-AFM，用于高速测量和大面积纳米制造。具有热机驱动、压阻式偏转检测和长寿命钻石尖端的主动悬臂梁与纳米定位和纳米测量机相结合，为在纳米测量机的整个运动范围内测量和检测亚纳米分辨率的纳米结构提供了很高的潜力。对于高精度的AFM测量，悬臂梁挠度的可追溯性是必须保证的。这将通过在第一个项目阶段设计的光学微微位置探测器来实现。

The object of the project is a high-precision Pico-AFM with active probes for high-speed measurements and nanofabrication in large areas. The active cantilevers with thermomechanical actuation, piezoresistive deflection detection and long-lived diamond tips, in combination with the nanopositioning and nanomeasuring machine, offer a high potential for the measurement and inspection of nanostructures with subnanometer resolution within the entire range of motion of the nanomeasuring machine. For high-precision AFM measurements, the traceability of the cantilever deflection is to be guaranteed. This will be achieved by means of the optical pico position detector designed in the first project phase.