Development and fabrication of functional micromechanical and MicroOptoElectro-Mechanical Systems (MOEMS) by ultra-high resolution 3D multi-photo material processing of new polymer materials

该项目的目的是应用新的多光子制造技术来实现功能微机械和微光电机械系统（MOEMS）。目前的MOEMS技术是基于集成电路多步骤制造中采用的2d方法。复杂的三维结构通常是通过组装单独的组件来实现的，因此需要许多专门的工具，包括高精度和昂贵的定位系统。这些缺点可以通过基于光敏材料的多光子处理（如双光子聚合）的新型超高分辨率技术来克服。有了这项技术，复杂的三维物体可以在一个单一的步骤中制造，而不需要组装。该技术为新型MOEMS的实现开辟了新的前景，具有更高的功能、集成度和更高的小型化水平。多光子聚合技术在制造MOEMS三维结构所需的互联可移动部件方面具有独特的潜力。在我们的初步工作中，后一个主题已经成功地证明了微转子的制造。微系统开发的一个特别具有挑战性的方面在于微机器的驱动。传统的驱动方法，如液压、气动、电动机和内燃机，要么难以在MOEMS尺寸上制造，要么根本无法在这些规模上很好地工作。该项目特别感兴趣的是开发用于实现功能MOEMS的新材料，从微致动器和微机器人的演示开始。为了产生微机械部件的运动，聚合物基质可以与金属或磁性纳米颗粒结合以实现电磁驱动。另外，可以在制造过程中加入可热或光学驱动的双晶圆材料。表征这些材料的三维多光子加工特性是本项目的目标之一。第二个目标是演示用于微型机器人和不同微系统切换的3D可移动部件和执行器。

The aim of this project is the application of novel multiphoton fabrication technologies for the realization of functional micromechanical and, in general, MicroOptoElectro-Mechanical Systems (MOEMS). Current MOEMS technologies are based on 2D-methodologies adopted from the multi-step fabrication of integrated circuits. Complex 3D structures are usually realized by assembling of separate components and thus, require numerous specialized tools, including high-precision and expensive positioning systems. These drawbacks can be overcome with the novel ultra-high resolution technology based on multi-photon processing (e.g. two-photon polymerization) of photosensitive materials. With this technology complex 3D objects with a sub-urn resolution can be fabricated in a single step without assembling. This technology opens new prospects for the realization of novel MOEMS with increased functionality, integration, and higher level of miniaturization. The multi-photon polymerization technique has a unique potential for the fabrication of interconnected movable components required for 3D architecture of MOEMS. In our preliminary work, the later topic has successfully been demonstrated with the fabrication of microrotors. A particularly challenging aspect of microsystem development lies in the actuation of the micromachines. Traditional actuation approaches, such as hydraulics, pneumatics, electric motors, and internal combustion engines, are either too difficult to fabricate at MOEMS sizes, or simply do not work well at those scales. Of special interest within this project is the development of new materials for the realization of functional MOEMS, starting from the demonstration of micro-actuators and microrobots. To generate a motion of a micromechanical component, the polymer matrices can be combined with metallic or magnetic nanoparticles for electromagnetic actuation. Otherwise, one can add into the fabrication process bimorph materials which can be thermally or optically actuated. The characterization of the 3D multi-photon processing properties of such materials is one of the goals of this project. The second goal, is the demonstration of 3D movable components and actuators for microrobotics and for switching of different micro-systems.