Monolithic co-resonantly coupled sensors

共振耦合悬臂梁系统已成功地应用于悬臂梁磁测量，并在原理实验中证明了很高的灵敏度。有了这些有希望的结果，许多不同的应用成为可能(例如，质量和力传感器，压力传感器)，但在此之前，有必要可靠地制造出具有所需参数的此类传感器。研究微制造技术在制造共振耦合传感器方面的适用性是这一提议的目的。必要的步骤是确定满足共振耦合设置要求的合适材料，研究不同的微制造方法(加法和减法)以确定一组方便的工艺步骤，最后检查传感器参数。此外，还需要考虑传感器的稳定性、灵敏度和检测率等理论方面的问题。一旦建立了可靠的制造工艺，就应该实施传感器并对其进行测试，以用水凝胶测定分子浓度。此外，传感器的驱动和检测方面的改进也是一个有前景的研究领域。

Co-resonantly coupled oscillating cantilever systems have been successfully applied for cantilever magnetometry and a very high sensitivity has been demonstrated in proof of principle experiments. With these promising results, many different applications are possible (e.g. mass and force sensing, pressure sensors) but beforehand it is necessary to reliably fabricate such sensors with desired parameters. The investigation of the applicability of microfabrication techniques for the production of co-resonantly coupled sensors is the aim of this proposal. Necessary steps are the identification of a suitable material fulfilling the requirements for the co-resonantly coupled set-up, investigation of different microfabrication methods (additive and subtractive) to determine a set of expedient process steps and finally the examination of the sensor parameters. Furthermore, also theoretiscal aspects such as sensor stability, sensitivity and detectivity need to be considered.Once a reliable fabrication process has been established, the sensors shall be implemented and tested for the determination of molecule concentrations by hydrogel. Furthermore, improvements for actuating and detecting of the sensor are a prospective area of research.