Study on low-temperature and high-rate deposition technology of ZnSe for the application to infrared sensor arrays

为实现红外窗口用硫化锌的低温高速沉积，研究了热线金属有机化学气相沉积(HW-MOCVD)技术。HW-MOCVD使用在2000℃左右加热的热线中的原子氢来分解烷基金属有机化合物。与等离子体相比，HW可以产生更多的原子氢，但HW被反应破坏，或在暴露于源气或还原时以氧化物的形式蒸发。此外，衬底受到来自HW的辐射的相当大的加热。在本研究中，我们开发了一种新的“远程式硬件系统”来解决上述问题。对所研制的硬件系统进行了基本表征，并确认其运行符合设计要求。以二乙基锌和二甲基硒为源，证明了锌硒的沉积。

For low-temperature and high-rate deposition of ZnSe, which is used for infrared windows, hot wire metal organic chemical vapor deposition (HW-MOCVD) was studied. HW-MOCVD uses atomic hydrogen from a hot wire heated at about 2000 deg.C to decompose alkyl metal organic compounds. The HW can generate a larger amount of atomic hydrogen than plasma, but the HW is damaged by reaction or evaporates as oxide when it is exposed to the source gas or degases. In addition, a substrates is considerably heated by radiation from the HW. In this study, we have developed a new "remote-type HW system" to solve the above problems. The developed HW system was fundamentally characterized, and its operation was confirmed as designed. The deposition of ZnSe was demonstrated using diethyl Zn and dimethyl Se as sources.