Development of Zr/W - Gun for nano-meter Auger Electron Microprobe

为研制纳米级俄歇电子探针，设计了一种新型高亮度电子枪。这支枪配备了一个由(100)取向的钨丝发射体和一层锆层组成的Zr/W尖端。研究发现，在扩展的肖特基发射区，Zr/W针尖的工作功函数粗略估计为3.2 eV。作为一种稳定的、高亮度的发射体，Zr/W-TiP的发射性能已经变得很好，最适合目前的用途。该电子枪系统安装在商品型扫描电子显微镜JSEM-840上。作为纳米俄歇电子探针的净性能正在测试中。评估报告很快就会公布。

A new type high brightness electron gun was designed for developing a nano-meter Auger electron microprobe. This gun was equiped with a Zr/W - tip consisting of a (100) - oriented tungusten emitter with an overlayer of zirconium. The emission properties was investigated to find that the work function of the Zr/W - tip operatinf in extended Schottky emission region was coarsely estimated to be 3.2eV. The emission properties of the Zr/W - tip has been turned to be excellent as a stable and high brightness emitter, most suitable for the present purpose. This electron gun system was mounted on a commercial type scanning electron microscope, JSEM-840. The net performance as a nano-meter Auger electron microprobe has been under examination. The assessment will be published shortly.