EDM of micro 3D shapes by applying trajectory movement of tool electrode.

研究了电火花线切割加工方法在各种微细形状加工中的适用性。通过实例验证了该方法的实用性。通过三维加工的基础实验，不仅可以加工出电极沿z轴方向移动的简单形状，而且可以加工出具有X平面和Y平面的复杂形状。在组合加工/装配系统上进行的实验结果表明，该方法不仅可以加工出电极沿z轴方向移动的简单形状，而且可以加工出具有X平面和Y平面的复杂形状。以液态金属离子束发射器的生产工艺为目标。1)可以通过向其中形成有微孔的基板施加超声波振动来将微针连接到微孔。2)组装在基板上的微针可用作微细电火花加工的电极。3)超声振动辅助电火花线切割加工与电火花线切割加工相结合，可在同一台设备上完成加工和装配。4)成功研制出了碳化钨合金液态金属离子束发射器的基体部分。本项目的创新部分--微细加工中心的研制，实现了电火花加工的自动化刀具准备和切削加工在同一台设备上进行。该系统，包括线切割，微细电火花加工和微细切削，有望提高加工微小三维形状的精度和生产率。

Applicability of WEDG method to the machining of various kinds of micro shapes was studied. Experiments were carried out for several practical examples and the practicability of the method was confirmed. Automatic machining of various shapes which had been impractical with conventional methods was proven to be possible.Fundamental experiments on three dimensional machining by the proposed method revealed that not only simple shapes obtained by z-axis movement of the electrode but also complicated shapes with X and Y plains can also be produced.Experiments on combined machining/assembly system lead to following results, targeting a production process for liquid metal ion beam emitters. 1) It is possible to connect a micropin to a microhole by applying an ultrasonic vibration to the base plate in which the microhole was made. 2) A micropin assembled on the base plate can be used as an electrode for micro EDM. 3) Machining and assemble can be accomplished on the same equipment by combining WEDG and EDM assisted by ultrasonic vibration. 4) The base part of an liquid metal ion beam emitter of tungsten carbide alloy was successfully fabricated.Innovational part of the project, the development of a micro machining center, realized the automatic tool preparation for EDM as well as cutting on the same equipment. This system, including WEDG, micro EDM and micro cutting, is expected to improve the accuracy and productivity in machining micro 3D shapes.