Development of High Repetition Rated Magnetic Switching Exciter for Pumping Excimer Lasers

从1985年到1986年进行的研究计划取得了以下结果。研制成功了一台由初级储能电容、可控硅开关、脉冲Transformer和三级磁脉冲压缩器组成的全固态准分子激光激励器。一个8秒的主长脉冲<micro>已被压缩到0.1<micro>秒的80.2倍。所研制的励磁机可以产生100 MW和5.2 J的输出脉冲与1.4欧姆的假负载。输出脉冲的上升时间为35 ns，电流上升速率为2 x &lt;10^11&gt; A/s。实验结果表明，脉冲压缩器的时间抖动小于10 ns，时间抖动与磁芯的工作电压和复位条件有关。编制了详细的磁脉冲压缩器计算机程序和自持放电泵浦KrF准分子激光器计算机程序。准分子激光程序包括放电电子的玻尔兹曼输运程序、离子反应和中性反应的速率方程以及光子反应。同时使用这两个代码，该励磁机可以精确的设计，并可以分析其工作特性.通过对激励器的最终调整，确定了56%的总体能量效率。三级磁力压缩机的能量效率高达65%。采用<F_2>/Kr/Ne=4/40/2236（Torr）的混合气体，获得了能量为68 mJ/脉冲的KrF激光，本征效率为1.7%。相应的总效率为0.6%。在40 pps的重复频率下产生2.2 W的平均输出。

The following results are obtained by the research program done since 1985 until 1986.1. An all solid state excimer laser exciter consisting of a primary energy storage capacitor, a SCR switch, a pulse transformer and a 3-stage magnetic pulse compressor has successfully been developed. A primary long pulse of 8 <micro> s has been compressed to 0.1 <micro> s by a factor of 80.2. The developed exciter could generate an output pulse of 100 MW and 5.2 J with a dummy load of 1.4 ohms. A rise time of the output pulse was 35 ns with a current rise rate of 2 x <10^11> A/s.3. The time jitter of less than 10 ns has been demonstrated, which was dependent on the operating voltage and the resetting conditions of the magnetic cores.A detailed computer code for the magnetic pulse compressor and a computer code for self-sustained discharge pumped KrF excimer lasers have been developed. The excimer laser code consists of Boltzmann transport code for discharge electrons, rate equations for ionic reactions and neutral reactions, and photon reactions. Using both codes simultaneously, this exciter can be precisely designed and its operational characteristics can be analyzed.5. By final adjustment of the exciter, an overall energy efficiency of 56% was established. The energy efficiency of the 3-stage magnetic compressor was as high as 65%. Using a mixture of <F_2> /Kr/Ne=4/40/2236(Torr), a KrF laser energy of 68 mJ/pulse was obtained with an intrinsic efficiency of 1.7%. The corresponding overall efficiency was 0.6%. An average output of 2.2 W was produced at a repetition rate frequency of 40 pps.