权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Novel processing of photonic and electronic materials by use of tailored femtosecond laser pulses

使用定制的飞秒激光脉冲对光子和电子材料进行新颖的加工

基本信息

批准号：
15206011
负责人：
OBARA Minoru
金额：
$ 27.87万
依托单位：
KEIO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2005
项目状态：
已结题

项目摘要

Novel laser processing of photonic and electronic materials with tailored femtosecond lasers has been demonstrated :Double-Pulsed Femtosecond Laser Processing ;(1)Using a double-pulsed femtosecond laser, unique ablation characteristics of fused quartz, sapphire, silicon and stainless steel have experimentally been demonstrated. The dependence of the delay time between the two pulses on the ablation characteristics is found to depend on the materials investigated. The ablation rate is decreased as the delay time is increased even within the electron-phonon relaxation time, and further decreased if the laser is strongly coupled with the laser produced plasma. The precise ablation processing of silicon substrate is demonstrated with double-pulsed femtosecond lasers in the delay time range of 30 ps to 100 ps.2)As for the fabrication of void in transparent materials, the pulse number dependence of void array length is experimentally investigated. The larger voids are fabricated with double-pulsed femtosecond lasers than single pulsed femtosecond lasers at a constant total pulse energy.(3)The low propagation loss optical waveguides are fabricated with double-pulsed femtosecond lasers.Nano-Processing with 2D Array Transparent Nano-Particles as Template ;(4)Sub-wavelength material processing mediated with sub-wavelength nano-particles has been demonstrated. The 2D array nano-holes have been fabricated on a silicon substrate.(5)The nano-hole profile is well consistent with the optical intensity profile calculated with FDTD simulation.

采用定制飞秒激光器对光子和电子材料进行了新型激光加工：双脉冲飞秒激光加工;（1）采用双脉冲飞秒激光器，对熔融石英、蓝宝石、硅和不锈钢等材料进行了独特的烧蚀实验。两个脉冲之间的烧蚀特性的延迟时间的依赖关系被发现取决于调查的材料。烧蚀率降低延迟时间增加，即使在电子-声子弛豫时间内，进一步降低，如果激光与激光产生的等离子体强耦合。在延迟时间为30 ps ~ 100 ps的范围内，利用双脉冲飞秒激光对硅基片进行了精确烧蚀加工。2）对于透明材料中孔洞的制备，实验研究了孔洞阵列长度与脉冲数的关系。在恒定的总脉冲能量下，用双脉冲飞秒激光比单脉冲飞秒激光制造更大的空洞。（3）采用双脉冲飞秒激光器制备了低传输损耗光波导;（4）采用二维阵列透明纳米粒子为模板进行了纳米加工;（5）采用亚波长纳米粒子进行了亚波长材料加工。在硅衬底上制作了二维阵列纳米孔。（5）纳米孔的分布与FDTD模拟计算的光强分布具有很好的一致性。