Novel processing of photonic and electronic materials by use of tailored femtosecond laser pulses

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Novel laser processing of photonic and electronic materials with tailored femtosecond lasers has been demonstrated :Double-Pulsed Femtosecond Laser Processing ;(1)Using a double-pulsed femtosecond laser, unique ablation characteristics of fused quartz, sapphire, silicon and stainless steel have experimentally been demonstrated. The dependence of the delay time between the two pulses on the ablation characteristics is found to depend on the materials investigated. The ablation rate is decreased as the delay time is increased even within the electron-phonon relaxation time, and further decreased if the laser is strongly coupled with the laser produced plasma. The precise ablation processing of silicon substrate is demonstrated with double-pulsed femtosecond lasers in the delay time range of 30 ps to 100 ps.2)As for the fabrication of void in transparent materials, the pulse number dependence of void array length is experimentally investigated. The larger voids are fabricated with double-pulsed femtosecond lasers than single pulsed femtosecond lasers at a constant total pulse energy.(3)The low propagation loss optical waveguides are fabricated with double-pulsed femtosecond lasers.Nano-Processing with 2D Array Transparent Nano-Particles as Template ;(4)Sub-wavelength material processing mediated with sub-wavelength nano-particles has been demonstrated. The 2D array nano-holes have been fabricated on a silicon substrate.(5)The nano-hole profile is well consistent with the optical intensity profile calculated with FDTD simulation.