Development of funcitionality ceramics by laser implantation method

本项目的目标是利用Kaser注入方法开发功能材料。陶瓷(SiO_2、Al_2O_3)表面覆盖金属薄膜(铜、金、钙等)用KrF准分子激光和CO_2气体激光照射。通过激光照射将金属原子注入到衬底中。利用同步辐射(SR)对陶瓷进行表面改性，得到了如下结果：(1)KrF激光注入SiO_2中的铜原子与SiO_2中的O原子形成化学键；(2)利用掩模图形和KrF激光照射，在SiO_2表面划出金属线；(3)利用CO_2气体激光照射，实现了Ca原子Al_2O_3的注入。尝试用SR对陶瓷进行表面改性。得到的结果与用激光获得的结果截然不同。这项研究还需要进一步研究。

The object of this project is a development of functionality matericals by kaser implantation method. Ceramics (SiO_2, Al_2O_3) which surfaces were covered by metal thin films (Cu, Au, Ca, etc.) were irradiated by KrF excimer laser of CO_2 gas laser. Metal atoms were implanted into the substrate by laser irradiation. A surface modification of ceramics by using synchrotron radiation (SR) was also attempted.The results obtained in this project are as follows.(1)Cu atoms implanted into SiO_2 by KrF laser irradiation form a chemical bond with O atom in SiO_2.(2)Drawing of metal lines on SiO_2 was schieved by using a mask pattern and KrF laser irradiation.(3)Implantation of Ca atoms Al_2O_3 was achieved by CO_2 gas laser irradiation. Development of biocompatible materials was achieved.(4)A surface modification of ceramics with SR was attempted. The result obtained is extremely different from that obtained with laser light. Further studies are required for this study.