Development of functionality ceramics by excimer laser ablation method and excimer lamp irradiation method

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The aim of this project is a surface modification of materials, in other words, a developemnt of functionality ceramics by pulsed excimer laser ablation method and continuos excimer light irradiation method. One is a development of a transparent conductor as an electrode. The other is a development of a biocompatible materials.The results obtained in this project are as follows ;A.Transparent conductive film(1) Transparent and conductive TiN thin films was formed on SiO_2 substrate by pulsed laser deposition (PLD) method.(2) Transmittannce for visible light and sheet conductivity of the film are 75% and 70OMEGA/*, respectively.B.Biocompatible materials(1) Alumina coverd with hydroxyapatite was formed by pulsed laser irradiation method.(2) Formation of real bone on the sample in stimulate body fluid mentioned above was achived.C.Others(1) An alumina film which emits visible light was formed on silicon substrate by PLD method.(2) A laser irradiation effect on human dental enamel was investigated.