Development of functionality ceramics by excimer laser ablation method and excimer lamp irradiation method

本项目的目的是对材料进行表面改性，即利用脉冲准分子激光烧蚀法和连续准分子光照射法开发功能陶瓷。一种是发展透明导体作为电极。二是生物相容性材料的开发。本项目取得的成果如下：A.透明导电薄膜(1)采用脉冲激光沉积(PLD)方法在SiO_2衬底上制备透明导电的TiN薄膜。(2)薄膜的可见光透过率和片层电导率分别为75%和70OMEGA/*。B.生物相容性材料(1)利用脉冲激光照射方法在氧化铝表面覆盖羟基磷灰石。(2)在上述刺激体液中在样品上形成真实的骨。C.其他(1)利用PLD方法在硅衬底上形成发射可见光的氧化铝薄膜。(2)研究激光对人牙釉质的照射效应。

The aim of this project is a surface modification of materials, in other words, a developemnt of functionality ceramics by pulsed excimer laser ablation method and continuos excimer light irradiation method. One is a development of a transparent conductor as an electrode. The other is a development of a biocompatible materials.The results obtained in this project are as follows ;A.Transparent conductive film(1) Transparent and conductive TiN thin films was formed on SiO_2 substrate by pulsed laser deposition (PLD) method.(2) Transmittannce for visible light and sheet conductivity of the film are 75% and 70OMEGA/*, respectively.B.Biocompatible materials(1) Alumina coverd with hydroxyapatite was formed by pulsed laser irradiation method.(2) Formation of real bone on the sample in stimulate body fluid mentioned above was achived.C.Others(1) An alumina film which emits visible light was formed on silicon substrate by PLD method.(2) A laser irradiation effect on human dental enamel was investigated.