Microtribology of Super hard films

为了改善其微观摩擦学性能，制备并研究了超硬薄膜。原子尺度表面态在微观摩擦学中是非常重要的。所需的表面材料通常不是自我牺牲型固体润滑膜，而是耐磨和润滑膜。表面成分被认为可以减少原子尺度的磨损和摩擦。提出了一种可实现微观摩擦学零磨损的表面材料成分模型。用扫描探针显微镜(SPM)研究了薄膜的微磨损性能，并对超硬薄膜的表面进行了表面改性，以改善薄膜的微摩擦学性能。通过减少滑动面之间的原子相互作用，可获得优异的原子级润滑性。这需要具有低表面能的材料，如C-F或石墨。通过提高膜层的强度，获得了优异的耐磨性。这种改进是通过使用超硬材料来实现的，如含硅碳膜、金刚石膜或立方氮化硼薄膜。

To improve the microtribological properties, super hard films were deposited and investigated. The atomic-scale surface state is very important in microtribology. The require surface material is not usually a self-sacrificing type solid lubricant film but rather a wear-resistant and lubricating film. The surface compositions are thought to reduce atomic-scale wear and friction fluctions. A surface material composition model that feasibly achieves the micro-tribological zero wear is suggested here. Microwear properties of these films were investigated by scanning probe microscope (SPM).The top surfaces of super hard films are modefied to improve the microtribological properties. Superior atomic-scale lubricities are obtained jby reducing the atomic interaction between the sliding surfaces. This requires a material with a low surface energy such as C-F or graphite. Superior wear resistance is obtained by improving the strength of films. Such improvements are made by using super hard materials such as silicon containing carbon film, diamond film or cubic boron nitride film.