Xenonbasiertes Focused Ion Beam Rasterelektronen-Mikroskop (FIB-REM) mit integrierter RAMAN-Spektroskopie

在工厂自动化和生产系统（FAPS）主席处，将通过DFG的资助以约130万欧元的价格购买一台集成拉曼光谱的氙聚焦离子束（FIB）-扫描电子显微镜（FIB-REM）。埃尔朗根-纽伦堡弗里德里希-亚历山大大学在材料科学和工艺研究领域享有盛誉。特别是，FAPS研究的用于生产机电功能的新技术，例如空间电路载体（MID）的激光结构化金属化，使用选择性激光熔化（SLM）或冷活性等离子体金属化（CAPM）的电力电子组件的增材生产以及电子和光学功能（天线，PV，OLED，传感器等）的印刷。在3D表面上使用喷墨、纳米或压电喷射技术，是全球独一无二的。基于介电弹性体致动器的人造肌肉、器官模型或用于人眼孔径控制的机电虹膜的生成性生产也是前所未有的。在通过扩散焊接和银烧结的小型化电子模块的组装和连接技术、通过激光或超声波焊接的电机结构中的电接触以及连接器的可靠性分析等领域的国际领先研究活动，也需要对几何细节和材料结构以及材料之间的相互关系有深刻的理解，工艺、环境条件和工厂规格。为了更精确地了解所研究的过程并开发新的潜力，获得先进的技术和仪器来分析原子水平上的材料状况和行为是一个基本的先决条件。扫描电子显微镜（SEM）是最先进的技术。SEM与氙基聚焦离子束（FIB）和拉曼光谱的结合开辟了全新的可能性，FAU尚未提供。

At the Chair of Factory Automation and Production Systems (FAPS) a xenon-based Focused Ion Beam (FIB) - Scanning Electron Microscope (FIB-REM) with integrated RAMAN spectroscopy is to be acquired for about 1.3 million € through funding by the DFG. The Friedrich-Alexander-University Erlangen-Nuremberg enjoys an excellent worldwide reputation in the fields of Material Sciences and Process Research. In particular, the new techniques researched at FAPS for the production of mechatronic functions, such as the laser-structured metallization of spatial circuit carriers (MID), the additive production of power electronic assemblies using selective laser melting (SLM) or cold active plasma metallization (CAPM) and the printing of electronic and optical functions (antennas, PV, OLED, sensors, etc.) on 3D surfaces with ink-, nano- or piezo jetting, are unique worldwide. The generative production of artificial muscles, organ models or a mechatronic iris for aperture control in the human eye on the basis of dielectric elastomer actuators is also unprecedented. The internationally leading research activities in the fields of assembly and connection technology of miniaturized electronic modules by means of diffusion soldering and silver sintering, electrical contacting in electrical machine construction by means of laser or ultrasonic welding as well as the analysis of the reliability of connectors also require a profound understanding of the geometric details and material structure as well as the interrelationships between material, process, environmental conditions and plant specifications. In order to understand the investigated processes more precisely and to open up new potentials, access to advanced techniques and instruments for the analysis of material condition and behaviour on an atomic level is a basic prerequisite. Scanning electron microscopy (SEM) is state of the art. The combination of the SEM with a xenon-based Focused Ion Beam (FIB) and a RAMAN spectroscopy opens up completely new possibilities and is not yet available at the FAU.