Micro-machining using ultraprecision machine tool with twist-roller friction drive

为提高精密金属加工技术，特别是用于制造光学零件和微机械的微细加工技术，研制了一种扭轮摩擦驱动超精密机床。扭轮摩擦传动是一种定位机构，是由头部研究人员为实现Angstrom定位分辨率而发明的。扭轮摩擦传动有利于超精密定位，但这种机构会产生一定的侧向力，影响定位工作台的运动直线度。在空气静压导轨中加入主动固有限制器，可以减小影响，提高直线度。采用扭轮摩擦传动和主动固有限制器的超精密机床具有三轴数控，具有滚磨加工能力，在车削实验中，将单点金刚石刀具安装在立式…上在水平Z轴上有多个Y工作台，在水平X工作台上的气浮轴上安装有铝合金。通过车削加工出平面镜和球面镜，并在镜面上加工出纳米量级的微台阶。加工零件的精度为0.1μm量级，表面粗糙度为10 nm量级。在铣削实验中，将小直径的球头安装在空气轴承主轴上，将铝合金安装在Y工作台上。通过球磨加工出高度为0.1 mm的小锥体和棱锥体。它们的精度约为10μm，表面粗糙度在几个微米量级。实验表明，采用扭轮摩擦传动的超精密机床是可行的。因此，本文的研究成果将为超精密定位和微加工技术的发展做出贡献。较少

An ultraprecision machine tool with the twist-roller friction drive is developed for improving the precision metal cutting technology, especially the micro-machining technology used for manufacturing optical parts and micro mechanism. The twist-roller friction drive is a kind of positioning mechanism, and was invented by the head investigator for realizing Angstrom positioning resolution. The twist-roller friction drive is advantageous for ultraprecision positioning, however, this mechanism causes some lateral force which influences the straightness of motion of the positioning table. The active inherent restrictor incorporated into the aerostatic guideway can decrease the influence and improve the straightness. The ultraprecision machine tool with the twist-roller friction drive and the active inherent restrictor has three axes that are numerically controlled, and has the ability of tuming and milling.In the experiment of turning, a single-point diamond tool is mounted on the vertical … More Y-table on the horizontal Z-axis and an aluminum alloy is mounted on the air-bearing spindle on the horizontal X-table. By turning, flat and spherical mirrors are manufactured, and micro steps in the order of nanometer are made on the mirror surface. Accuracy of machined parts is in the order of 0.1μm, and surface roughness is in the order of 10nm. In the experiment of milling, a small diameter of ball endmil is mounted on the air-bearing spindle and the aluminum alloy is mounted on the Y-table. By milling, small cones and pyramids whose height are 0.1mm are manufactured. Their accuracy is about 10μm and surface roughness is in the order of several microns. Small letters and gear are also manufactured in the same accuracy shown above.These experiments show that the ultraprecision machine tool with the twist-roller friction drive can be used in practice. Therefore, the result of this research can contribute the development of the ultraprecision positioning and the micro-machining technologies. Less