Ultra-Precision Machining of Replicated Aspherical Optical Components

本研究旨在建立下一代X射线望远镜用超精密非球面光学元件的制造技术，包括制作超精密非球面镜芯、在镜芯上涂覆重金属涂层、在镜芯上压制或成形衬底、从镜芯上取下衬底以及制作复制的非球面光学元件。这项技术是将于2010年发射升空的掠入射X射线望远镜的关键制造技术。主要研究成果如下：1.我们与美国的Dr.S.F.SCARES公司合作，研制了一种新型的扫描激光散射显微镜，可以高精度地测量锋利的金刚石刀具的鼻尖半径，该仪器可以检测出锋利透明的钻石的边缘，也可以检测…通过与超稳定半导体激光器、超高速半导体传感器和压电加速器连接的扫描光纤，实现了数十nm分辨率的更多LS。该显微镜的分辨率优于扫描电子显微镜和激光显微镜。X射线望远镜需要面形误差小于100 nm、表面粗糙度均方根小于0.5 nm的非球面光学反射镜。化学镀镍是唯一一种可以进行钻石加工和光学抛光的材料。将化学镀镍代替玻璃芯棒进行金刚石车削，获得了0.344 nm均方根值的表面粗糙度。我们试图制造具有铂/碳多层膜的复制X射线镜，用于下一代X射线望远镜。我们可以从化学镀镍芯棒中去除厚厚的铂或金层，但不能从化学镀镍芯棒中去除复制的铂/碳超级反射镜。这个问题必须在未来解决。较少

The aim of this research is to establish the manufacturing technology of ultra-precision aspherical light optics for next-generation X-ray telescopes by the following methods ; making ultra-precision aspherical mandrels, putting heavy metal coating on mandrels, pressing or forming the substrates on the mandrels, removing the substrates from the mandrels and making replicated aspherical light optics. This technology is the key manufacturing technology of the grazing incident X-ray telescope that will be intended to launch in space in 2010. And this technology will be also the base manufacturing technology of X-ray microscopes for biotechnology and medical applications.The outlines of research results are as follows :1. We have developed a new scanning laser scattering microscope that can measure the nose radius of sharp diamond cutting tools in high precision in cooperation with Dr. S. F. Scares of US & A in U. S. A. The apparatus can detect the edge of sharp and transparent diamond too … More ls in tens of nm resolution by scanning optical fiber connected with ultra-stable semiconductor laser, ultra-fast semiconductor sensor and piezo accelerator. The microscope is superior in resolution to a SEM and laser microscope.2. The aspherical-shape light mirrors having less than 100nm in figure error and less than 0.5nm rms in surface roughness are needed in an X-ray telescope. Electroless nickel is the only one material that can be diamond-turned and also optically polished. The electroless nickel was diamond-turned for obtaining X-ray telescope mirror mandrels instead of glass mandrel, and the surface roughness of 0.344nm rms was obtained only by diamond-turning process on the material.3. We tried to make replicated X-ray mirrors having Pt/C multilayers for the next-generation X-ray telescope. We can remove thick Pt or Au layers from electroless nickel mandrel, however we could not remove replicated Pt/C super mirrors from the electroless nickel mandrel. This problem has to be solved in future. Less