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Ultra-Precision Vertical Spindle Grinder for Ceramics

超精密陶瓷立式主轴磨床

基本信息

批准号：
59850028
负责人：
NAMBA Yoshiharu
金额：
$ 5.89万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research
财政年份：
1984
资助国家：
日本
起止时间：
1984 至 1985
项目状态：
已结题

项目摘要

Single crystals and glass ceramics of zero thermal expansion coefficient are expected to be machined ultra-precisely in near future. These materials have been lapped and polished because of their brittle mechanical properties. This research intends to develop a new ultra-precision vertical spindle grinder which can finish ceramic materials into flat mirror surfaces having sub-micron in dimensional accuracy. It is the most important to control the thermal expansion of materials to be ground, a grinding wheel and machine tool for getting the sub-micron accuracy in grinding process. This research tried to reduce such thermal expansion by two methods, that is, using of glass ceramics of zerothermal expansion coefficient as a material of a grinding wheel spindle and controlling the temperatures in room, grinding water and hydrostatic pressure oil for making the temperatures of a machine tool, grinding wheel and workpiece uniform. No body has developed a glass ceramic spindle because of brittleness and expensive cost for machining. By development of new casting ＆ heat treating processes and examination of grindability and polishability of the glass ceramics, the first grinding spindle made of glass ceramics having zero thermal expansion coefficient has been designed and manufactured. Depth of cut in grinding process is numerically controlled in the unit of 0.1 micron/pulse which is performed by the rigid spindles and bearings for a grinding wheel and table. Hydrostatic oil bearings are designed and manufactured having the features such as low thermal expansion, higher rigidity and higher revolutional accuracy. MnZn ferrite single crystal surfaces of 0.08micron in flatness and of 0.015 micron Rz in surface roughness were obtained by using this new grinder. By development of dressing and a grinding wheel, the smoother surface of less than 0.01 micron Rmax will be obtained by the machine.

在不久的将来，单晶体和零热膨胀系数的玻璃陶瓷有望被超精密加工。这些材料由于其脆性机械特性而被研磨和抛光。本研究旨在开发一种新型超精密立轴磨床，可将陶瓷材料加工成亚微米级的平面镜面。在磨削加工过程中，控制被磨削材料、砂轮和机床的热膨胀是获得亚微米精度的关键。本研究试图通过两种方法来降低这种热膨胀，即采用零膨胀系数的微晶玻璃作为砂轮主轴材料，并通过控制室内温度、磨削水温度和静压油温度，使机床、砂轮和工件的温度均匀。由于玻璃陶瓷主轴的脆性和昂贵的加工成本，没有人开发玻璃陶瓷主轴。通过开发新的铸造工艺和热处理工艺，并对微晶玻璃的磨削性能和抛光性能进行试验，设计并制造了第一根零热膨胀微晶玻璃磨削主轴。磨削过程中的切削深度以0.1微米/脉冲为单位进行数控，由刚性主轴和砂轮和工作台的轴承执行。静压油轴承的设计和制造具有低热膨胀、高刚度和高旋转精度等特点。用该磨床加工的锰锌铁氧体单晶表面平整度为0.08 μ m，表面粗糙度为0.015 μ m。通过修整和砂轮的研制，可获得最大粗糙度小于0.01 μ m的光滑表面。