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Ultra-Precision Machining and Surface Evaluation of Optical Flats for High Power Ultra-Violet Lasers

高功率紫外激光器光学平面的超精密加工和表面评估

基本信息

批准号：
01550106
负责人：
NAMBA Yoshiharu
金额：
$ 1.28万
依托单位：
Chubu University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1989
资助国家：
日本
起止时间：
1989 至无数据
项目状态：
已结题

项目摘要

The final objects of this study is to develop the flat optical components having high accuracy, high transparency or reflectivity, higher laser damage threshold and higher responsibility for high power lasers of ultra-violet in wavelength, in order to help the development of high power excimer lasers and laser fusion program. This year's study was performed in the following three parts; ultra-precision machining of optical materials, establishing the surface roughness measuring systems in high precision and measuring laser damage thresholds in machined surfaces.1) The surface roughness of less than 5nm Rmax or 0.5nm rms was obtained on various glass surfaces ground by using the ultra-precision surface grinder and a SDI500-75-B diamond wheel. The CVD-SIC on SiC which seems to be one of the ideal material as mirrors for high power ultra-violet lasers have been polished by the float polishing. The steps at grain boundaries have been seen after float polishing because the CVD film was not … More deposited uniformly in crystallographic orientation. The surface roughness of 0.2nm rms was obtained in a grain of small size. The development of uniform CVD-SIC film on SiC will introduce the smooth optical surface as a mirror after float polishing. The fused silica as the material of transparency in ultra-violet wavelength was polished into 0.14nm rms by the float polishing.2) Dr. Jean M. Bennett came and stayed in Chubu University to fix her stylus- type ultra-precision surface roughness measuring system which is the most sensitive stylus system in the world and its noise level is 0.05nm rms. New scanning tunneling microscope having a Nomarski interference microscope has been developed with Seiko electronic industry. Magnetron spattering apparatus was also developed with JOEL for measuring STM image on bigger-sized sample of 15OX15OX30 mm.3) High power laser was irradiated on ground and optically polished LHG-8 laser glass samples for measuring laser damage thresholds. The damage threshold of 25J/cm was obtained on ground surface. This value is much higher than that on optically-polished surfaces. Less

本研究的最终目标是开发高精度、高透明或反射率、高激光损伤阈值和高责任的平面光学元件，用于波长为紫外线的高功率激光器，以帮助高功率准分子激光器和激光聚变项目的发展。今年的研究分为以下三个部分：光学材料的超精密加工，建立高精度表面粗糙度测量系统，测量被加工表面的激光损伤阈值。1)利用超精密平面磨床和SDI500-75-B金刚石砂轮对各种玻璃表面进行磨削，得到了Rmax小于5nm或rms小于0.5nm的表面粗糙度。利用浮子抛光技术对SiC上的CVD-SIC进行了抛光处理，SiC是高功率紫外激光反射镜的理想材料之一。在浮子抛光后，由于CVD膜在晶体取向上的沉积不均匀，在晶界上出现了台阶。在小尺寸晶粒中获得了0.2nm rms的表面粗糙度。在SiC表面制备均匀CVD-SIC薄膜，将引入浮子抛光后光滑的光学表面作为镜面。采用浮子抛光法将石英石英作为紫外透明材料抛光至rms为0.14nm。2) Jean M. Bennett博士来中部大学固定她的触控笔式超精密表面粗糙度测量系统，这是世界上最灵敏的触控笔系统，其噪声水平为0.05nm rms。与精工电子共同研制了新型扫描隧道显微镜，该显微镜采用诺玛斯基干涉显微镜。利用JOEL开发了磁控溅射仪，在15OX15OX30 mm的大尺寸样品上测量STM图像。3)在地面上照射高功率激光，对LHG-8激光玻璃样品进行光学抛光，测量激光损伤阈值。地表损伤阈值为25J/cm。这个值比光抛光表面高得多。少