Development of New Ultra-Precision Machining Using Solid Lasers in Ultraviolet

使用紫外固体激光器开发新型超精密加工

基本信息

  • 批准号:
    01850034
  • 负责人:
  • 金额:
    $ 5.31万
  • 依托单位:
  • 依托单位国家:
    日本
  • 项目类别:
    Grant-in-Aid for Developmental Scientific Research
  • 财政年份:
    1989
  • 资助国家:
    日本
  • 起止时间:
    1989 至 1991
  • 项目状态:
    已结题

项目摘要

There is a big demand for getting more precise parts in modern industries, so that the ultra-precision machining has been developed recently. However, there are three drawbacks on the machining accuracy in the mechanical machining process, and the drawbacks are the tool wear, deflection and thermal deformation. The laser machining process using laser ablation is one of the most important process for ultra-precision machining in future because of non-contact and non-thermal machining process. This process can solve the abovementioned problems in mechanical machinings, and also this process can deposit material on a sample as well as remove material from the sample without introducing much heat. This process also has a feature that the surface figure can be monitored by a laser interferometer during the machining process. Research results are summerized as follows :1. There has been developed an ultra-precision laser machining system which consists of UV lasers, a 32-bit computer, a mechanical scanning apparatus, a vacuum chamber for laser CVD, and an interferometer for measuring a surface figure on a sample.2. New solid state UV laser system of a small size has been developed by using a YAG laser and nonlinear optical crystals for micro-fabrication process.3. Pure metals and fused silica canbe easily removed by UV lasers rather than YAG lasers, in spite of having a loss for frequency conversion.4. A metal tungsten film can be deposited on a slicon substrate at a rate of 0.1 angstrom/pulse in thickness by laser ablation of tungsten hexacarbonyl.5. A table mesa has been generated as an example for making shapes by laser CVD. A flat surface has been obtained by laser deposition of metal into a pit on a substrate.6. A much smoother surface can be obtained on a laser-irradiated surface by photo-chemical process of UV lasers by comparison with thermal process of YAG lasers.
现代工业对精密零件的需求量很大,因此近年来发展了超精密加工技术。然而,机械加工过程中的加工精度存在三大缺陷,即刀具磨损、变形和热变形。激光烧蚀加工具有非接触、非热加工的特点,是未来超精密加工的重要工艺之一。这种工艺可以解决机械加工中的上述问题,而且这种工艺既可以在样品上沉积材料,也可以在不引入太多热量的情况下从样品中去除材料。该工艺还具有一个特点,即在加工过程中可以用激光干涉仪监测表面形状。主要研究成果如下:1.研制了一套由紫外光激光器、32位计算机、机械扫描装置、激光CVD真空室和测量样品表面形貌的干涉仪组成的超精密激光加工系统。利用YAG激光器和非线性光学晶体进行微细加工,研制出了一种新型的小尺寸固体紫外激光系统。纯金属和熔融二氧化硅可以很容易地被UV激光而不是YAG激光去除,尽管有频率转换的损失。利用六羰基钨的激光烧蚀技术,可以在薄片衬底上以0.1埃/脉冲的速度沉积金属钨薄膜。作为激光CVD成形的一个实例,生成了一个台面。通过将金属激光沉积到衬底上的凹坑中,获得了平坦的表面。与热处理相比,紫外光激光的光化学处理可以在被激光照射的表面获得更光滑的表面。

项目成果

期刊论文数量(180)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
難波 義治: "21世紀への展望" 中部大学, 336 (1990)
难波芳晴:《21世纪的展望》中部大学,336(1990)
  • DOI:
  • 发表时间:
  • 期刊:
  • 影响因子:
    0
  • 作者:
  • 通讯作者:
難波 義治: "有機非線形光学結晶の精密研削" 1991年度精密工学会秋季大会学術講演会講演論文集. 67-68 (1991)
难波芳治:《有机非线性光学晶体的精密研磨》1991年日本精密工程学会秋季会议学术会议论文集67-68(1991)。
  • DOI:
  • 发表时间:
  • 期刊:
  • 影响因子:
    0
  • 作者:
  • 通讯作者:
Y. NAMBA: "Higher Removal Process due to Shorten YAG Lasers in Wavelength" Proc. Jap. Laser Soc. Annual Meeting. 181. (1991)
Y. NAMBA:“由于缩短 YAG 激光器波长而实现更高的去除工艺”Proc。
  • DOI:
  • 发表时间:
  • 期刊:
  • 影响因子:
    0
  • 作者:
  • 通讯作者:
{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

数据更新时间:{{ journalArticles.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ monograph.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ sciAawards.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ conferencePapers.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ patent.updateTime }}

NAMBA Yoshiharu其他文献

NAMBA Yoshiharu的其他文献

{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

{{ truncateString('NAMBA Yoshiharu', 18)}}的其他基金

Development of Multi-Layered Aspheric Mirrors for InternationalX-Ray Observatory
国际X射线天文台多层非球面镜的研制
  • 批准号:
    22360063
  • 财政年份:
    2010
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of replicated aspherical mirrors for next-generation hard X-ray telescopes and evaluation of optical properties
下一代硬X射线望远镜复制非球面镜的开发及光学特性评估
  • 批准号:
    18360073
  • 财政年份:
    2006
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Development of X-Ray Multilayer Aspheric Mirrors by Replication Technology and Nano-Structure Analysis
利用复制技术和纳米结构分析开发X射线多层非球面镜
  • 批准号:
    15360075
  • 财政年份:
    2003
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Ultra-Precision Machining of Replicated Aspherical Optical Components
复制非球面光学元件的超精密加工
  • 批准号:
    12450063
  • 财政年份:
    2000
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Grant-in-Aid for Scientific Research (B)
Ultra-Precision Machining and Surface Evaluation of Optical Flats for High Power Ultra-Violet Lasers
高功率紫外激光器光学平面的超精密加工和表面评估
  • 批准号:
    02650104
  • 财政年份:
    1990
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (C)
Ultra-Precision Machining and Surface Evaluation of Optical Flats for High Power Ultra-Violet Lasers
高功率紫外激光器光学平面的超精密加工和表面评估
  • 批准号:
    01550106
  • 财政年份:
    1989
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Grant-in-Aid for General Scientific Research (C)
Ultra-Precision Vertical Spindle Grinder for Ceramics
超精密陶瓷立式主轴磨床
  • 批准号:
    59850028
  • 财政年份:
    1984
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Grant-in-Aid for Developmental Scientific Research

相似海外基金

High-power UV-Laser Fragmentation System
高功率紫外激光破碎系统
  • 批准号:
    491146928
  • 财政年份:
    2022
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Major Research Instrumentation
Development of high efficiency, small footprint, and low cost UV laser technology
开发高效率、小占地面积、低成本的紫外激光技术
  • 批准号:
    566550-2021
  • 财政年份:
    2022
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Alliance Grants
Development of high efficiency, small footprint, and low cost UV laser technology
开发高效率、小占地面积、低成本的紫外激光技术
  • 批准号:
    566550-2021
  • 财政年份:
    2021
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Alliance Grants
IIBR Instrumentation: Sub-micrometer Resolution Mass Spectrometry Imaging by Deep-UV Laser Ablation and Post-ionization
IIBR 仪器:通过深紫外激光烧蚀和后电离进行亚微米分辨率质谱成像
  • 批准号:
    1951447
  • 财政年份:
    2020
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Standard Grant
Developing an ultra compact UV laser by frequency quadrupling a mode-locked Yb-doped fiber laser
通过将锁模掺镱光纤激光器频率提高四倍来开发超紧凑型紫外激光器
  • 批准号:
    552133-2020
  • 财政年份:
    2020
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Alliance Grants
Single electron drift studies using UV laser
使用紫外激光进行单电子漂移研究
  • 批准号:
    540445-2019
  • 财政年份:
    2019
  • 资助金额:
    $ 5.31万
  • 项目类别:
    University Undergraduate Student Research Awards
Ultrafast deep UV laser source by all intracavity fourth harmonic generation
全腔内四次谐波产生的超快深紫外激光源
  • 批准号:
    1709918
  • 财政年份:
    2017
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Standard Grant
Time-resolved photoelectron spectroscopy of biomolecules using vacuum-UV laser
使用真空紫外激光的生物分子时间分辨光电子能谱
  • 批准号:
    16K17528
  • 财政年份:
    2016
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Grant-in-Aid for Young Scientists (B)
Low-cost Spatial Beam Combination enabling UV Laser Diode Arrays for Stereolithography
低成本空间光束组合支持用于立体光刻的紫外激光二极管阵列
  • 批准号:
    132202
  • 财政年份:
    2016
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Feasibility Studies
Electron beam excited nitride-based UV laser
电子束激发氮化物基紫外激光器
  • 批准号:
    15H02019
  • 财政年份:
    2015
  • 资助金额:
    $ 5.31万
  • 项目类别:
    Grant-in-Aid for Scientific Research (A)
{{ showInfoDetail.title }}

作者:{{ showInfoDetail.author }}

知道了