Development of X-Ray Multilayer Aspheric Mirrors by Replication Technology and Nano-Structure Analysis

利用复制技术和纳米结构分析开发X射线多层非球面镜

• 批准号: 15360075
• 负责人: NAMBA Yoshiharu
• 金额: $ 9.79万
• 依托单位: Chubu University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-15360075/
• 关键词: Aspheric molding die; Replicated mirror; Pt; C multilayer; Separation; Transmission electron microscopy; Atomic force microscopy; X-ray optics; Single point diamond turning; 超高圧透過型電子顕微鏡; 斜入射X線望遠鏡; X線多層膜の設計; 無電解ニッケル非球面金型

After depositing Pt/C multilayer on a glass cylinder, we glued aluminum foil on it and cured in a vacuum chamber with an infrared heater. Pt/C multilayer mirrors on aluminum foils were separated from the glass cylinder and were used in a hard X-ray telescope as replicated thin foil mirrors. The telescope was lunched several times in U.S.A.by balloons for observing hard X-ray objects in a space.The float-polished electroless nickel plane was coated with Pt/C multilayer and glued with a flat grass plate using epoxy resin, and we could separate the Pt/C multilayer from the electroless nickel plane perfectly. The surface roughness was 0.14nm rms on the electroless nickel plane and 0.16nm rms on the Pt/C multilayer mirror, respectively.The high resolution transmission electron microscopy (TEM) sectional observation of Pt/C multilayer coated on a silicon wafer cleared that C layer showed an amorphous structure and Pt layer showed an oriented polycrystalline nano structure which causes the surface roughness at the interface between two layers. The interface roughness is increased with the decrease of layer spacing less than 3nm in the Pt/C multilayer.By adding an intermediate Ti layer between the electroless nickel aspheric die and the first Pt layer, we could separate the Pt/C multilayer from the electroless nickel die and obtain Pt/C multilayer replicated internal mirrors for hard X-ray application.This technology was used in making a gold plated aspheric inner mirror of 6 mm in diameter and we obtained aspheric X-ray replicated collecting mirrors of 72nm in shape accuracy and 1nm Ra in surface roughness. Then we made a soft X-ray microscope of less than 50nm in image resolution.

在玻璃筒上沉积铂/碳多层膜后，在其上粘贴铝箔，并在真空室中用红外加热器进行固化。将铝箔上的PT/C多层膜反射镜从玻璃柱上分离出来，用于硬X射线望远镜中的复制薄箔反射镜。该望远镜曾多次在美国用气球发射，用于观测太空中的硬X射线物体。在漂浮抛光的化学镀镍平面上涂覆一层铂/碳多层膜，并用环氧树脂将平坦的草板粘合在一起，可以将铂/碳多层膜与化学镀镍平面完美地分开。表面粗糙度分别为0.14 nm rms和0.16 nm rms。高分辨透射电子显微镜观察发现，C层为非晶态结构，而铂层为定向多晶纳米结构，导致两层界面处的表面粗糙。采用该技术制作了直径6 mm镀金非球面内镜，获得了形状精度为72 nm、表面粗糙度为1 nm的镀金非球面内镜。然后制作了图像分辨率小于50 nm的软X射线显微镜。

项目成果

Optimization of a Wolter type I mirror for a soft X-ray microscope

• DOI: 10.1016/j.precisioneng.2005.09.002
• 发表时间: 2006-04
• 期刊: Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology
• 影响因子: 3.6
• 作者: K. Chon;Y. Namba;K. Yoon

High Resolution Transmission Electron Microscopy Study of Calcium Fluoride Single Crystal (111) Surfaces Processed by Ultraprecision Machining

• DOI: 10.2320/matertrans.47.267
• 发表时间: 2006-02
• 期刊: Materials Transactions
• 影响因子: 1.2
• 作者: N. Ohnishi;S. Yoshida;Y. Namba

Experimental Quantization of Surface and Sub-Surface Structure in Float Polished Crystalline Quartz

浮法抛光石英晶体表面和次表面结构的实验量化

• 发表时间: 2004
• 期刊: JSME Int'l Journal, Series C 47・1
• 作者: H.Eda;J.Shimizu;J.Otsuka;S.F.Soares
• 通讯作者: S.F.Soares

多層膜スーパーミラー硬X線望遠鏡

多层超镜面硬X射线望远镜

• 发表时间: 2004
• 期刊: 日本物理学会誌 59、2
• 作者: H.Matsuoka;H.Kokumai;S.Okubo;S.Fukui;山下廣順
• 通讯作者: 山下廣順

山下廣順: "多層膜スーパーミラー硬X線望遠鏡"物理学会誌. 59, 2. 77-83 (2004)

Hirojun Yamashita：“多层超镜硬X射线望远镜”日本物理学会杂志59, 2. 77-83 (2004)。